Development and test of model apparatus of non-contact spin processor for photo mask production applying radial-type superconducting magnetic bearing

Kimiyo Saito, Satoshi Fukui, Masaru Maezawa, Jun Ogawa, Tetsuo Oka, Takao Sato

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

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Physics & Astronomy

Chemical Compounds

Engineering & Materials Science