Development and test of model apparatus of non-contact spin processor for photo mask production applying radial-type superconducting magnetic bearing

Kimiyo Saito, Satoshi Fukui, Masaru Maezawa, Jun Ogawa, Tetsuo Oka, Takao Sato

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Fingerprint Dive into the research topics of 'Development and test of model apparatus of non-contact spin processor for photo mask production applying radial-type superconducting magnetic bearing'. Together they form a unique fingerprint.

Physics & Astronomy

Chemical Compounds

Engineering & Materials Science