Development and test of model apparatus utilizing HTS magnetic levitation for non-contact spinning clean-up processors of photo mask production

Kimiyo Saito, Satoshi Fukui, Jun Ogawa, Tetsuo Oka, Takao Sato, Satoshi Sorimachi, Shinsuke Miyazaki

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

It is considered that particle deposition on the photo mask, such as oil dusts which are generated from mechanical bearings of the spin processors, is one of main causes of the deterioration of pattern preciseness. In our R & D, application of magnetic levitation utilizing bulk HTSs to the spin processors for the photo mask production has been proposed. In this study, we try to develop a new model apparatus demonstrating non-contact spinning clean-up processor in photo mask production system. The levitation and rotation test by using this model apparatus showed that this new model apparatus accomplished the remarkable improvement of the levitation and the rotation ability. This paper describes the levitation and rotation test results of the new model spinner comparing with those obtained in our previous study.

Original languageEnglish
Article number5617305
Pages (from-to)2241-2244
Number of pages4
JournalIEEE Transactions on Applied Superconductivity
Volume21
Issue number3 PART 2
DOIs
Publication statusPublished - 2011 Jun 1
Externally publishedYes

Fingerprint

Magnetic levitation
levitation
metal spinning
central processing units
Masks
masks
Bearings (structural)
spinners
deterioration
Dust
Deterioration
Oils
oils
dust
causes

Keywords

  • Bulk HTS
  • Magnetic levitation
  • Spin processor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Development and test of model apparatus utilizing HTS magnetic levitation for non-contact spinning clean-up processors of photo mask production. / Saito, Kimiyo; Fukui, Satoshi; Ogawa, Jun; Oka, Tetsuo; Sato, Takao; Sorimachi, Satoshi; Miyazaki, Shinsuke.

In: IEEE Transactions on Applied Superconductivity, Vol. 21, No. 3 PART 2, 5617305, 01.06.2011, p. 2241-2244.

Research output: Contribution to journalArticle

Saito, Kimiyo ; Fukui, Satoshi ; Ogawa, Jun ; Oka, Tetsuo ; Sato, Takao ; Sorimachi, Satoshi ; Miyazaki, Shinsuke. / Development and test of model apparatus utilizing HTS magnetic levitation for non-contact spinning clean-up processors of photo mask production. In: IEEE Transactions on Applied Superconductivity. 2011 ; Vol. 21, No. 3 PART 2. pp. 2241-2244.
@article{fbf5b8b98ddf42fc9a51897e98287ba0,
title = "Development and test of model apparatus utilizing HTS magnetic levitation for non-contact spinning clean-up processors of photo mask production",
abstract = "It is considered that particle deposition on the photo mask, such as oil dusts which are generated from mechanical bearings of the spin processors, is one of main causes of the deterioration of pattern preciseness. In our R & D, application of magnetic levitation utilizing bulk HTSs to the spin processors for the photo mask production has been proposed. In this study, we try to develop a new model apparatus demonstrating non-contact spinning clean-up processor in photo mask production system. The levitation and rotation test by using this model apparatus showed that this new model apparatus accomplished the remarkable improvement of the levitation and the rotation ability. This paper describes the levitation and rotation test results of the new model spinner comparing with those obtained in our previous study.",
keywords = "Bulk HTS, Magnetic levitation, Spin processor",
author = "Kimiyo Saito and Satoshi Fukui and Jun Ogawa and Tetsuo Oka and Takao Sato and Satoshi Sorimachi and Shinsuke Miyazaki",
year = "2011",
month = "6",
day = "1",
doi = "10.1109/TASC.2010.2081655",
language = "English",
volume = "21",
pages = "2241--2244",
journal = "IEEE Transactions on Applied Superconductivity",
issn = "1051-8223",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "3 PART 2",

}

TY - JOUR

T1 - Development and test of model apparatus utilizing HTS magnetic levitation for non-contact spinning clean-up processors of photo mask production

AU - Saito, Kimiyo

AU - Fukui, Satoshi

AU - Ogawa, Jun

AU - Oka, Tetsuo

AU - Sato, Takao

AU - Sorimachi, Satoshi

AU - Miyazaki, Shinsuke

PY - 2011/6/1

Y1 - 2011/6/1

N2 - It is considered that particle deposition on the photo mask, such as oil dusts which are generated from mechanical bearings of the spin processors, is one of main causes of the deterioration of pattern preciseness. In our R & D, application of magnetic levitation utilizing bulk HTSs to the spin processors for the photo mask production has been proposed. In this study, we try to develop a new model apparatus demonstrating non-contact spinning clean-up processor in photo mask production system. The levitation and rotation test by using this model apparatus showed that this new model apparatus accomplished the remarkable improvement of the levitation and the rotation ability. This paper describes the levitation and rotation test results of the new model spinner comparing with those obtained in our previous study.

AB - It is considered that particle deposition on the photo mask, such as oil dusts which are generated from mechanical bearings of the spin processors, is one of main causes of the deterioration of pattern preciseness. In our R & D, application of magnetic levitation utilizing bulk HTSs to the spin processors for the photo mask production has been proposed. In this study, we try to develop a new model apparatus demonstrating non-contact spinning clean-up processor in photo mask production system. The levitation and rotation test by using this model apparatus showed that this new model apparatus accomplished the remarkable improvement of the levitation and the rotation ability. This paper describes the levitation and rotation test results of the new model spinner comparing with those obtained in our previous study.

KW - Bulk HTS

KW - Magnetic levitation

KW - Spin processor

UR - http://www.scopus.com/inward/record.url?scp=79957917675&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79957917675&partnerID=8YFLogxK

U2 - 10.1109/TASC.2010.2081655

DO - 10.1109/TASC.2010.2081655

M3 - Article

VL - 21

SP - 2241

EP - 2244

JO - IEEE Transactions on Applied Superconductivity

JF - IEEE Transactions on Applied Superconductivity

SN - 1051-8223

IS - 3 PART 2

M1 - 5617305

ER -