Abstract
It is considered that particle deposition on the photo mask, such as oil dusts which are generated from mechanical bearings of the spin processors, is one of main causes of the deterioration of pattern preciseness. In our R & D, application of magnetic levitation utilizing bulk HTSs to the spin processors for the photo mask production has been proposed. In this study, we try to develop a new model apparatus demonstrating non-contact spinning clean-up processor in photo mask production system. The levitation and rotation test by using this model apparatus showed that this new model apparatus accomplished the remarkable improvement of the levitation and the rotation ability. This paper describes the levitation and rotation test results of the new model spinner comparing with those obtained in our previous study.
Original language | English |
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Article number | 5617305 |
Pages (from-to) | 2241-2244 |
Number of pages | 4 |
Journal | IEEE Transactions on Applied Superconductivity |
Volume | 21 |
Issue number | 3 PART 2 |
DOIs | |
Publication status | Published - 2011 Jun |
Externally published | Yes |
Keywords
- Bulk HTS
- Magnetic levitation
- Spin processor
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering