Development and test of model apparatus utilizing HTS magnetic levitation for non-contact spinning clean-up processors of photo mask production

Kimiyo Saito, Satoshi Fukui, Jun Ogawa, Tetsuo Oka, Takao Sato, Satoshi Sorimachi, Shinsuke Miyazaki

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

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Physics & Astronomy

Chemical Compounds

Engineering & Materials Science