Development of a compact angle-resolved secondary ion mass spectrometer for Ar+ sputtering

Shinichi Kawaguchi, Masaki Tanemura, Masato Kudo, Nobumasa Handa, Naokazu Kinoshita, Lei Miao, Sakae Tanemura, Yasuhito Gotoh, Meiyong Liao, Satoko Shinkai

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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy