Development of a stage-scanning system for high-resolution confocal STEM

Masaki Takeguchi, Ayako Hashimoto, Masayuki Shimojo, Kazutaka Mitsuishi, Kazuo Furuya

Research output: Contribution to journalArticle

45 Citations (Scopus)

Abstract

A stage-scanning system is composed of a specially designed transmission electron microscopy specimen holder equipped with a piezo-driven specimen stage, power supplier and control software. This system enables the specimen to be scanned three-dimensionally, and therefore confocal scanning transmission electron microscopy (STEM) can be performed with a fixed electron-optics configuration. It is demonstrated that stage-scanning confocal STEM images can be obtained with the lateral atomic resolution and the specimen can be moved three-dimensionally with high precision.

Original languageEnglish
Pages (from-to)123-127
Number of pages5
JournalJournal of Electron Microscopy
Volume57
Issue number4
DOIs
Publication statusPublished - 2008 Aug
Externally publishedYes

Fingerprint

Transmission electron microscopy
Scanning
transmission electron microscopy
Scanning electron microscopy
scanning electron microscopy
scanning
high resolution
Electron optics
electron optics
holders
computer programs
configurations

Keywords

  • Confocal scanning transmission electron microscopy
  • Optical sectioning
  • Piezo actuators
  • Pinhole
  • Stage-scanning system
  • Three-dimensional scanning

ASJC Scopus subject areas

  • Instrumentation

Cite this

Development of a stage-scanning system for high-resolution confocal STEM. / Takeguchi, Masaki; Hashimoto, Ayako; Shimojo, Masayuki; Mitsuishi, Kazutaka; Furuya, Kazuo.

In: Journal of Electron Microscopy, Vol. 57, No. 4, 08.2008, p. 123-127.

Research output: Contribution to journalArticle

Takeguchi, Masaki ; Hashimoto, Ayako ; Shimojo, Masayuki ; Mitsuishi, Kazutaka ; Furuya, Kazuo. / Development of a stage-scanning system for high-resolution confocal STEM. In: Journal of Electron Microscopy. 2008 ; Vol. 57, No. 4. pp. 123-127.
@article{561a3ae53ca44f0b9104faaedd8c1e78,
title = "Development of a stage-scanning system for high-resolution confocal STEM",
abstract = "A stage-scanning system is composed of a specially designed transmission electron microscopy specimen holder equipped with a piezo-driven specimen stage, power supplier and control software. This system enables the specimen to be scanned three-dimensionally, and therefore confocal scanning transmission electron microscopy (STEM) can be performed with a fixed electron-optics configuration. It is demonstrated that stage-scanning confocal STEM images can be obtained with the lateral atomic resolution and the specimen can be moved three-dimensionally with high precision.",
keywords = "Confocal scanning transmission electron microscopy, Optical sectioning, Piezo actuators, Pinhole, Stage-scanning system, Three-dimensional scanning",
author = "Masaki Takeguchi and Ayako Hashimoto and Masayuki Shimojo and Kazutaka Mitsuishi and Kazuo Furuya",
year = "2008",
month = "8",
doi = "10.1093/jmicro/dfn010",
language = "English",
volume = "57",
pages = "123--127",
journal = "Microscopy (Oxford, England)",
issn = "2050-5698",
publisher = "Japanese Society of Microscopy",
number = "4",

}

TY - JOUR

T1 - Development of a stage-scanning system for high-resolution confocal STEM

AU - Takeguchi, Masaki

AU - Hashimoto, Ayako

AU - Shimojo, Masayuki

AU - Mitsuishi, Kazutaka

AU - Furuya, Kazuo

PY - 2008/8

Y1 - 2008/8

N2 - A stage-scanning system is composed of a specially designed transmission electron microscopy specimen holder equipped with a piezo-driven specimen stage, power supplier and control software. This system enables the specimen to be scanned three-dimensionally, and therefore confocal scanning transmission electron microscopy (STEM) can be performed with a fixed electron-optics configuration. It is demonstrated that stage-scanning confocal STEM images can be obtained with the lateral atomic resolution and the specimen can be moved three-dimensionally with high precision.

AB - A stage-scanning system is composed of a specially designed transmission electron microscopy specimen holder equipped with a piezo-driven specimen stage, power supplier and control software. This system enables the specimen to be scanned three-dimensionally, and therefore confocal scanning transmission electron microscopy (STEM) can be performed with a fixed electron-optics configuration. It is demonstrated that stage-scanning confocal STEM images can be obtained with the lateral atomic resolution and the specimen can be moved three-dimensionally with high precision.

KW - Confocal scanning transmission electron microscopy

KW - Optical sectioning

KW - Piezo actuators

KW - Pinhole

KW - Stage-scanning system

KW - Three-dimensional scanning

UR - http://www.scopus.com/inward/record.url?scp=47649083560&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=47649083560&partnerID=8YFLogxK

U2 - 10.1093/jmicro/dfn010

DO - 10.1093/jmicro/dfn010

M3 - Article

VL - 57

SP - 123

EP - 127

JO - Microscopy (Oxford, England)

JF - Microscopy (Oxford, England)

SN - 2050-5698

IS - 4

ER -