Development of Dielectrophoretic Devices with High-Aspect Ratio Microstructures Using Proton Beam Writing

Yasuharu Shiine; Hiroyuki Nishikawa; Yusuke Furuta; T. Sato; Yasuyuki Ishii; Tomihiro Kamiya; Ryota Nakao; Satoshi Uchida

Development of Dielectrophoretic Devices with High-Aspect Ratio Microstructures Using Proton Beam Writing

Yasuharu Shiine, Hiroyuki Nishikawa, Yusuke Furuta, T. Sato, Yasuyuki Ishii, Tomihiro Kamiya, Ryota Nakao, Satoshi Uchida

Research output: Contribution to journal › Article

Original language	English
Journal	Proceedings of the 16th International Conference on Surface Modification of Materials by Ion Beams (September 13-18, 2009)
Publication status	Published - 2009 Sep 1

Cite this

Shiine, Y., Nishikawa, H., Furuta, Y., Sato, T., Ishii, Y., Kamiya, T., Nakao, R., & Uchida, S. (2009). Development of Dielectrophoretic Devices with High-Aspect Ratio Microstructures Using Proton Beam Writing. Proceedings of the 16th International Conference on Surface Modification of Materials by Ion Beams (September 13-18, 2009).

Development of Dielectrophoretic Devices with High-Aspect Ratio Microstructures Using Proton Beam Writing. / Shiine, Yasuharu; Nishikawa, Hiroyuki; Furuta, Yusuke; Sato, T.; Ishii, Yasuyuki; Kamiya, Tomihiro; Nakao, Ryota; Uchida, Satoshi.

In: Proceedings of the 16th International Conference on Surface Modification of Materials by Ion Beams (September 13-18, 2009), 01.09.2009.

Research output: Contribution to journal › Article

Shiine, Yasuharu ; Nishikawa, Hiroyuki ; Furuta, Yusuke ; Sato, T. ; Ishii, Yasuyuki ; Kamiya, Tomihiro ; Nakao, Ryota ; Uchida, Satoshi. / Development of Dielectrophoretic Devices with High-Aspect Ratio Microstructures Using Proton Beam Writing. In: Proceedings of the 16th International Conference on Surface Modification of Materials by Ion Beams (September 13-18, 2009). 2009.

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