Development of Dielectrophoretic Devices with High-Aspect Ratio Microstructures Using Proton Beam Writing

Yasuharu Shiine, Hiroyuki Nishikawa, Yusuke Furuta, T. Sato, Yasuyuki Ishii, Tomihiro Kamiya, Ryota Nakao, Satoshi Uchida

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@article{8e555d65d0da4c00bb9bc370fa7dbd9e,
title = "Development of Dielectrophoretic Devices with High-Aspect Ratio Microstructures Using Proton Beam Writing",
author = "Yasuharu Shiine and Hiroyuki Nishikawa and Yusuke Furuta and T. Sato and Yasuyuki Ishii and Tomihiro Kamiya and Ryota Nakao and Satoshi Uchida",
year = "2009",
month = "9",
day = "1",
language = "English",
journal = "Proceedings of the 16th International Conference on Surface Modification of Materials by Ion Beams (September 13-18, 2009)",

}

TY - JOUR

T1 - Development of Dielectrophoretic Devices with High-Aspect Ratio Microstructures Using Proton Beam Writing

AU - Shiine, Yasuharu

AU - Nishikawa, Hiroyuki

AU - Furuta, Yusuke

AU - Sato, T.

AU - Ishii, Yasuyuki

AU - Kamiya, Tomihiro

AU - Nakao, Ryota

AU - Uchida, Satoshi

PY - 2009/9/1

Y1 - 2009/9/1

M3 - Article

JO - Proceedings of the 16th International Conference on Surface Modification of Materials by Ion Beams (September 13-18, 2009)

JF - Proceedings of the 16th International Conference on Surface Modification of Materials by Ion Beams (September 13-18, 2009)

ER -