Original language | English |
---|---|
Journal | Proceedings of the 16th International Conference on Surface Modification of Materials by Ion Beams (September 13-18, 2009) |
Publication status | Published - 2009 Sep 1 |
Development of Dielectrophoretic Devices with High-Aspect Ratio Microstructures Using Proton Beam Writing
Yasuharu Shiine, Hiroyuki Nishikawa, Yusuke Furuta, T. Sato, Yasuyuki Ishii, Tomihiro Kamiya, Ryota Nakao, Satoshi Uchida
Research output: Contribution to journal › Article › peer-review