Development of Dielectrophoretic Devices with High-Aspect Ratio Microstructures Using Proton Beam Writing

Yasuharu Shiine; Hiroyuki Nishikawa; Yusuke Furuta; T. Sato; Yasuyuki Ishii; Tomihiro Kamiya; Ryota Nakao; Satoshi Uchida

Development of Dielectrophoretic Devices with High-Aspect Ratio Microstructures Using Proton Beam Writing

Yasuharu Shiine, Hiroyuki Nishikawa, Yusuke Furuta, T. Sato, Yasuyuki Ishii, Tomihiro Kamiya, Ryota Nakao, Satoshi Uchida

Research output: Contribution to journal › Article

Original language	English
Journal	Proceedings of the 16th International Conference on Surface Modification of Materials by Ion Beams (September 13-18, 2009)
Publication status	Published - 2009 Sep 1

Cite this

Shiine, Y., Nishikawa, H., Furuta, Y., Sato, T., Ishii, Y., Kamiya, T., ... Uchida, S. (2009). Development of Dielectrophoretic Devices with High-Aspect Ratio Microstructures Using Proton Beam Writing. Proceedings of the 16th International Conference on Surface Modification of Materials by Ion Beams (September 13-18, 2009).

Development of Dielectrophoretic Devices with High-Aspect Ratio Microstructures Using Proton Beam Writing. / Shiine, Yasuharu; Nishikawa, Hiroyuki; Furuta, Yusuke; Sato, T.; Ishii, Yasuyuki; Kamiya, Tomihiro; Nakao, Ryota; Uchida, Satoshi.

In: Proceedings of the 16th International Conference on Surface Modification of Materials by Ion Beams (September 13-18, 2009), 01.09.2009.

Research output: Contribution to journal › Article

Shiine, Yasuharu ; Nishikawa, Hiroyuki ; Furuta, Yusuke ; Sato, T. ; Ishii, Yasuyuki ; Kamiya, Tomihiro ; Nakao, Ryota ; Uchida, Satoshi. / Development of Dielectrophoretic Devices with High-Aspect Ratio Microstructures Using Proton Beam Writing. In: Proceedings of the 16th International Conference on Surface Modification of Materials by Ion Beams (September 13-18, 2009). 2009.

@article{8e555d65d0da4c00bb9bc370fa7dbd9e,

title = "Development of Dielectrophoretic Devices with High-Aspect Ratio Microstructures Using Proton Beam Writing",

author = "Yasuharu Shiine and Hiroyuki Nishikawa and Yusuke Furuta and T. Sato and Yasuyuki Ishii and Tomihiro Kamiya and Ryota Nakao and Satoshi Uchida",

year = "2009",

month = "9",

day = "1",

language = "English",

journal = "Proceedings of the 16th International Conference on Surface Modification of Materials by Ion Beams (September 13-18, 2009)",

}

TY - JOUR

T1 - Development of Dielectrophoretic Devices with High-Aspect Ratio Microstructures Using Proton Beam Writing

AU - Shiine, Yasuharu

AU - Nishikawa, Hiroyuki

AU - Furuta, Yusuke

AU - Sato, T.

AU - Ishii, Yasuyuki

AU - Kamiya, Tomihiro

AU - Nakao, Ryota

AU - Uchida, Satoshi

PY - 2009/9/1

Y1 - 2009/9/1

M3 - Article

JO - Proceedings of the 16th International Conference on Surface Modification of Materials by Ion Beams (September 13-18, 2009)

JF - Proceedings of the 16th International Conference on Surface Modification of Materials by Ion Beams (September 13-18, 2009)

ER -