Development of embedded Mach-Zehnder optical waveguide structures in polydimethylsiloxane thin films by proton beam writing

W. Kada, K. Miura, H. Kato, R. Saruya, A. Kubota, T. Satoh, M. Koka, Y. Ishii, T. Kamiya, Hiroyuki Nishikawa, O. Hanaizumi

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

A focused 750 keV proton microbeam was used to fabricate an embedded Mach-Zehnder (MZ) optical waveguide in a polydimethylsiloxane (PDMS) film for interferometer application. The sample position was precisely controlled by a mechanical stage together with scanning microbeam to form an embedded MZ waveguide structure within an area of 0.3 mm × 40 mm. The MZ waveguides with core size of 8 μm was successfully embedded in PDMS film at a depth of 18 μm by 750 keV proton microbeam with fluences from 10 to 100 nC/mm2. The MZ waveguides were coupled with an IR fiber-laser with a center wavelength of 1550 nm and evaluated by using the transmitted intensity images from an IR vidicon camera. The results indicate that the embedded MZ waveguide structure in PDMS achieved single spot light propagation, which is necessary for building optical switching circuits based on polymer MZ waveguides.

Original languageEnglish
Pages (from-to)218-222
Number of pages5
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume348
DOIs
Publication statusPublished - 2015

Fingerprint

Proton beams
Optical waveguides
Polydimethylsiloxane
proton beams
optical waveguides
Mach number
microbeams
waveguides
Waveguides
Thin films
thin films
Protons
switching circuits
protons
Switching circuits
optical switching
Light propagation
infrared lasers
fiber lasers
Fiber lasers

Keywords

  • Embedded structures
  • Interferometer
  • Mach-Zehnder optical waveguide
  • Polydimethylsiloxane
  • Proton beam writing

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

Cite this

Development of embedded Mach-Zehnder optical waveguide structures in polydimethylsiloxane thin films by proton beam writing. / Kada, W.; Miura, K.; Kato, H.; Saruya, R.; Kubota, A.; Satoh, T.; Koka, M.; Ishii, Y.; Kamiya, T.; Nishikawa, Hiroyuki; Hanaizumi, O.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 348, 2015, p. 218-222.

Research output: Contribution to journalArticle

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AU - Kubota, A.

AU - Satoh, T.

AU - Koka, M.

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AU - Nishikawa, Hiroyuki

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