Development of high-acceleration and ultra-precision linear motor drive machine tool equipped with the anti-vibration system

Kazuo Nakamoto, Masahiro Anzai, Shinichi Matsumoto

Research output: Contribution to journalArticle

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)543-546
Number of pages4
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume74
Issue number6
DOIs
Publication statusPublished - 2008 Jun
Externally publishedYes

Keywords

  • Anti-vibration system
  • Pneumatic spindle
  • Ultra-precision machine tool

ASJC Scopus subject areas

  • Mechanical Engineering

Cite this