Development of high-resolution MFM-tips

Michael Rudolf Koblischka, Astrid N. Müller, Uwe Hartmann, Thomas Sulzbach, Paul M. Dodd

Research output: Contribution to journalConference article

Abstract

The preparation of high-resolution magnetic force microscopy (MFM) tips using the EBD method for MFM measurements on soft magnetic materials was discussed. Electron beam lithography (EBL) using a scanning electron microscope (SEM) was used to define small particles of the magnetic material at the very end of the tip to achieve maximum lateral resolution. The results using these tips for measurements on GMR read heads were presented.

Original languageEnglish
JournalDigests of the Intermag Conference
Publication statusPublished - 2002 Dec 1
Externally publishedYes
Event2002 IEEE International Magnetics Conference-2002 IEEE INTERMAG - Amsterdam, Netherlands
Duration: 2002 Apr 282002 May 2

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Magnetic force microscopy
Soft magnetic materials
Electron beam lithography
Magnetic materials
Electron microscopes
Scanning

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Koblischka, M. R., Müller, A. N., Hartmann, U., Sulzbach, T., & Dodd, P. M. (2002). Development of high-resolution MFM-tips. Digests of the Intermag Conference.

Development of high-resolution MFM-tips. / Koblischka, Michael Rudolf; Müller, Astrid N.; Hartmann, Uwe; Sulzbach, Thomas; Dodd, Paul M.

In: Digests of the Intermag Conference, 01.12.2002.

Research output: Contribution to journalConference article

Koblischka, MR, Müller, AN, Hartmann, U, Sulzbach, T & Dodd, PM 2002, 'Development of high-resolution MFM-tips', Digests of the Intermag Conference.
Koblischka MR, Müller AN, Hartmann U, Sulzbach T, Dodd PM. Development of high-resolution MFM-tips. Digests of the Intermag Conference. 2002 Dec 1.
Koblischka, Michael Rudolf ; Müller, Astrid N. ; Hartmann, Uwe ; Sulzbach, Thomas ; Dodd, Paul M. / Development of high-resolution MFM-tips. In: Digests of the Intermag Conference. 2002.
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