Development of high-resolution MFM-tips

Michael R. Koblischka; Astrid N. Müller; Uwe Hartmann; Thomas Sulzbach; Paul M. Dodd

Development of high-resolution MFM-tips

Michael R. Koblischka, Astrid N. Müller, Uwe Hartmann, Thomas Sulzbach, Paul M. Dodd

Research output: Contribution to journal › Conference article

Abstract

The preparation of high-resolution magnetic force microscopy (MFM) tips using the EBD method for MFM measurements on soft magnetic materials was discussed. Electron beam lithography (EBL) using a scanning electron microscope (SEM) was used to define small particles of the magnetic material at the very end of the tip to achieve maximum lateral resolution. The results using these tips for measurements on GMR read heads were presented.

Original language	English
Pages (from-to)	DU03
Journal	Digests of the Intermag Conference
Publication status	Published - 2002 Dec 1
Externally published	Yes
Event	2002 IEEE International Magnetics Conference-2002 IEEE INTERMAG - Amsterdam, Netherlands Duration: 2002 Apr 28 → 2002 May 2

ASJC Scopus subject areas

Electrical and Electronic Engineering

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Koblischka, M. R., Müller, A. N., Hartmann, U., Sulzbach, T., & Dodd, P. M. (2002). Development of high-resolution MFM-tips. Digests of the Intermag Conference, DU03.

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AU - Koblischka, Michael R.

AU - Müller, Astrid N.

AU - Hartmann, Uwe

AU - Sulzbach, Thomas

AU - Dodd, Paul M.

PY - 2002/12/1

Y1 - 2002/12/1

N2 - The preparation of high-resolution magnetic force microscopy (MFM) tips using the EBD method for MFM measurements on soft magnetic materials was discussed. Electron beam lithography (EBL) using a scanning electron microscope (SEM) was used to define small particles of the magnetic material at the very end of the tip to achieve maximum lateral resolution. The results using these tips for measurements on GMR read heads were presented.

AB - The preparation of high-resolution magnetic force microscopy (MFM) tips using the EBD method for MFM measurements on soft magnetic materials was discussed. Electron beam lithography (EBL) using a scanning electron microscope (SEM) was used to define small particles of the magnetic material at the very end of the tip to achieve maximum lateral resolution. The results using these tips for measurements on GMR read heads were presented.

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AN - SCOPUS:0036917077

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T2 - 2002 IEEE International Magnetics Conference-2002 IEEE INTERMAG

Y2 - 28 April 2002 through 2 May 2002

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