Abstract
The preparation of high-resolution magnetic force microscopy (MFM) tips using the EBD method for MFM measurements on soft magnetic materials was discussed. Electron beam lithography (EBL) using a scanning electron microscope (SEM) was used to define small particles of the magnetic material at the very end of the tip to achieve maximum lateral resolution. The results using these tips for measurements on GMR read heads were presented.
| Original language | English |
|---|---|
| Journal | Digests of the Intermag Conference |
| Publication status | Published - 2002 Dec 1 |
| Externally published | Yes |
| Event | 2002 IEEE International Magnetics Conference-2002 IEEE INTERMAG - Amsterdam, Netherlands Duration: 2002 Apr 28 → 2002 May 2 |
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ASJC Scopus subject areas
- Electrical and Electronic Engineering
Cite this
Development of high-resolution MFM-tips. / Koblischka, Michael Rudolf; Müller, Astrid N.; Hartmann, Uwe; Sulzbach, Thomas; Dodd, Paul M.
In: Digests of the Intermag Conference, 01.12.2002.Research output: Contribution to journal › Conference article
}
TY - JOUR
T1 - Development of high-resolution MFM-tips
AU - Koblischka, Michael Rudolf
AU - Müller, Astrid N.
AU - Hartmann, Uwe
AU - Sulzbach, Thomas
AU - Dodd, Paul M.
PY - 2002/12/1
Y1 - 2002/12/1
N2 - The preparation of high-resolution magnetic force microscopy (MFM) tips using the EBD method for MFM measurements on soft magnetic materials was discussed. Electron beam lithography (EBL) using a scanning electron microscope (SEM) was used to define small particles of the magnetic material at the very end of the tip to achieve maximum lateral resolution. The results using these tips for measurements on GMR read heads were presented.
AB - The preparation of high-resolution magnetic force microscopy (MFM) tips using the EBD method for MFM measurements on soft magnetic materials was discussed. Electron beam lithography (EBL) using a scanning electron microscope (SEM) was used to define small particles of the magnetic material at the very end of the tip to achieve maximum lateral resolution. The results using these tips for measurements on GMR read heads were presented.
UR - http://www.scopus.com/inward/record.url?scp=0036917077&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0036917077&partnerID=8YFLogxK
M3 - Conference article
AN - SCOPUS:0036917077
JO - Digests of the Intermag Conference
JF - Digests of the Intermag Conference
SN - 0074-6843
ER -