Abstract
The preparation of high-resolution magnetic force microscopy (MFM) tips using the EBD method for MFM measurements on soft magnetic materials was discussed. Electron beam lithography (EBL) using a scanning electron microscope (SEM) was used to define small particles of the magnetic material at the very end of the tip to achieve maximum lateral resolution. The results using these tips for measurements on GMR read heads were presented.
| Original language | English |
|---|---|
| Pages (from-to) | DU03 |
| Journal | Digests of the Intermag Conference |
| Publication status | Published - 2002 Dec 1 |
| Event | 2002 IEEE International Magnetics Conference-2002 IEEE INTERMAG - Amsterdam, Netherlands Duration: 2002 Apr 28 → 2002 May 2 |
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ASJC Scopus subject areas
- Electrical and Electronic Engineering
Cite this
Koblischka, M. R., Müller, A. N., Hartmann, U., Sulzbach, T., & Dodd, P. M. (2002). Development of high-resolution MFM-tips. Digests of the Intermag Conference, DU03.