Abstract
In this contribution, we report on the preparation of high-resolution MFM tips using the EBD-method for MFM measurements on soft magnetic samples. Electron beam lithography (EBL) using a scanning electron microscope (SEM) was used to define small particles of magnetic material at the very end of a commercial scanning microscope tip to achieve maximum lateral resolution with low magnetic moment.
Original language | English |
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Title of host publication | INTERMAG Europe 2002 - IEEE International Magnetics Conference |
Editors | J. Fidler, B. Hillebrands, C. Ross, D. Weller, L. Folks, E. Hill, M. Vazquez Villalabeitia, J. A. Bain, Jo De Boeck, R. Wood |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
ISBN (Electronic) | 0780373650, 9780780373655 |
DOIs | |
Publication status | Published - 2002 Jan 1 |
Externally published | Yes |
Event | 2002 IEEE International Magnetics Conference, INTERMAG Europe 2002 - Amsterdam, Netherlands Duration: 2002 Apr 28 → 2002 May 2 |
Other
Other | 2002 IEEE International Magnetics Conference, INTERMAG Europe 2002 |
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Country/Territory | Netherlands |
City | Amsterdam |
Period | 02/4/28 → 02/5/2 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering
- Surfaces, Coatings and Films