Development of high-resolution MFM-tips

Michael Rudolf Koblischka, A. N. Müller, U. Hartmann, T. Sulzback, P. Dodd

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this contribution, we report on the preparation of high-resolution MFM tips using the EBD-method for MFM measurements on soft magnetic samples. Electron beam lithography (EBL) using a scanning electron microscope (SEM) was used to define small particles of magnetic material at the very end of a commercial scanning microscope tip to achieve maximum lateral resolution with low magnetic moment.

Original languageEnglish
Title of host publicationINTERMAG Europe 2002 - IEEE International Magnetics Conference
EditorsJ. Fidler, B. Hillebrands, C. Ross, D. Weller, L. Folks, E. Hill, M. Vazquez Villalabeitia, J. A. Bain, Jo De Boeck, R. Wood
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)0780373650, 9780780373655
DOIs
Publication statusPublished - 2002 Jan 1
Externally publishedYes
Event2002 IEEE International Magnetics Conference, INTERMAG Europe 2002 - Amsterdam, Netherlands
Duration: 2002 Apr 282002 May 2

Other

Other2002 IEEE International Magnetics Conference, INTERMAG Europe 2002
CountryNetherlands
CityAmsterdam
Period02/4/2802/5/2

Fingerprint

Scanning
Electron beam lithography
Magnetic materials
Magnetic moments
Microscopes
Electron microscopes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering
  • Surfaces, Coatings and Films

Cite this

Koblischka, M. R., Müller, A. N., Hartmann, U., Sulzback, T., & Dodd, P. (2002). Development of high-resolution MFM-tips. In J. Fidler, B. Hillebrands, C. Ross, D. Weller, L. Folks, E. Hill, M. Vazquez Villalabeitia, J. A. Bain, J. De Boeck, ... R. Wood (Eds.), INTERMAG Europe 2002 - IEEE International Magnetics Conference [1001100] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/INTMAG.2002.1001100

Development of high-resolution MFM-tips. / Koblischka, Michael Rudolf; Müller, A. N.; Hartmann, U.; Sulzback, T.; Dodd, P.

INTERMAG Europe 2002 - IEEE International Magnetics Conference. ed. / J. Fidler; B. Hillebrands; C. Ross; D. Weller; L. Folks; E. Hill; M. Vazquez Villalabeitia; J. A. Bain; Jo De Boeck; R. Wood. Institute of Electrical and Electronics Engineers Inc., 2002. 1001100.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Koblischka, MR, Müller, AN, Hartmann, U, Sulzback, T & Dodd, P 2002, Development of high-resolution MFM-tips. in J Fidler, B Hillebrands, C Ross, D Weller, L Folks, E Hill, M Vazquez Villalabeitia, JA Bain, J De Boeck & R Wood (eds), INTERMAG Europe 2002 - IEEE International Magnetics Conference., 1001100, Institute of Electrical and Electronics Engineers Inc., 2002 IEEE International Magnetics Conference, INTERMAG Europe 2002, Amsterdam, Netherlands, 02/4/28. https://doi.org/10.1109/INTMAG.2002.1001100
Koblischka MR, Müller AN, Hartmann U, Sulzback T, Dodd P. Development of high-resolution MFM-tips. In Fidler J, Hillebrands B, Ross C, Weller D, Folks L, Hill E, Vazquez Villalabeitia M, Bain JA, De Boeck J, Wood R, editors, INTERMAG Europe 2002 - IEEE International Magnetics Conference. Institute of Electrical and Electronics Engineers Inc. 2002. 1001100 https://doi.org/10.1109/INTMAG.2002.1001100
Koblischka, Michael Rudolf ; Müller, A. N. ; Hartmann, U. ; Sulzback, T. ; Dodd, P. / Development of high-resolution MFM-tips. INTERMAG Europe 2002 - IEEE International Magnetics Conference. editor / J. Fidler ; B. Hillebrands ; C. Ross ; D. Weller ; L. Folks ; E. Hill ; M. Vazquez Villalabeitia ; J. A. Bain ; Jo De Boeck ; R. Wood. Institute of Electrical and Electronics Engineers Inc., 2002.
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