Development of high-resolution MFM-tips

Michael Rudolf Koblischka; A. N. Müller; U. Hartmann; T. Sulzback; P. Dodd

doi:10.1109/INTMAG.2002.1001100

Development of high-resolution MFM-tips

Michael Rudolf Koblischka, A. N. Müller, U. Hartmann, T. Sulzback, P. Dodd

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In this contribution, we report on the preparation of high-resolution MFM tips using the EBD-method for MFM measurements on soft magnetic samples. Electron beam lithography (EBL) using a scanning electron microscope (SEM) was used to define small particles of magnetic material at the very end of a commercial scanning microscope tip to achieve maximum lateral resolution with low magnetic moment.

Original language	English
Title of host publication	INTERMAG Europe 2002 - IEEE International Magnetics Conference
Editors	J. Fidler, B. Hillebrands, C. Ross, D. Weller, L. Folks, E. Hill, M. Vazquez Villalabeitia, J. A. Bain, Jo De Boeck, R. Wood
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	0780373650, 9780780373655
DOIs	https://doi.org/10.1109/INTMAG.2002.1001100
Publication status	Published - 2002 Jan 1
Externally published	Yes
Event	2002 IEEE International Magnetics Conference, INTERMAG Europe 2002 - Amsterdam, Netherlands Duration: 2002 Apr 28 → 2002 May 2

Other

Other	2002 IEEE International Magnetics Conference, INTERMAG Europe 2002
Country	Netherlands
City	Amsterdam
Period	02/4/28 → 02/5/2

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering
Surfaces, Coatings and Films

Access to Document

10.1109/INTMAG.2002.1001100

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Cite this

Koblischka, M. R., Müller, A. N., Hartmann, U., Sulzback, T., & Dodd, P. (2002). Development of high-resolution MFM-tips. In J. Fidler, B. Hillebrands, C. Ross, D. Weller, L. Folks, E. Hill, M. Vazquez Villalabeitia, J. A. Bain, J. De Boeck, & R. Wood (Eds.), INTERMAG Europe 2002 - IEEE International Magnetics Conference [1001100] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/INTMAG.2002.1001100

Development of high-resolution MFM-tips. / Koblischka, Michael Rudolf; Müller, A. N.; Hartmann, U.; Sulzback, T.; Dodd, P.

INTERMAG Europe 2002 - IEEE International Magnetics Conference. ed. / J. Fidler; B. Hillebrands; C. Ross; D. Weller; L. Folks; E. Hill; M. Vazquez Villalabeitia; J. A. Bain; Jo De Boeck; R. Wood. Institute of Electrical and Electronics Engineers Inc., 2002. 1001100.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Koblischka, MR, Müller, AN, Hartmann, U, Sulzback, T & Dodd, P 2002, Development of high-resolution MFM-tips. in J Fidler, B Hillebrands, C Ross, D Weller, L Folks, E Hill, M Vazquez Villalabeitia, JA Bain, J De Boeck & R Wood (eds), INTERMAG Europe 2002 - IEEE International Magnetics Conference., 1001100, Institute of Electrical and Electronics Engineers Inc., 2002 IEEE International Magnetics Conference, INTERMAG Europe 2002, Amsterdam, Netherlands, 02/4/28. https://doi.org/10.1109/INTMAG.2002.1001100

Koblischka MR, Müller AN, Hartmann U, Sulzback T, Dodd P. Development of high-resolution MFM-tips. In Fidler J, Hillebrands B, Ross C, Weller D, Folks L, Hill E, Vazquez Villalabeitia M, Bain JA, De Boeck J, Wood R, editors, INTERMAG Europe 2002 - IEEE International Magnetics Conference. Institute of Electrical and Electronics Engineers Inc. 2002. 1001100 https://doi.org/10.1109/INTMAG.2002.1001100

Koblischka, Michael Rudolf ; Müller, A. N. ; Hartmann, U. ; Sulzback, T. ; Dodd, P. / Development of high-resolution MFM-tips. INTERMAG Europe 2002 - IEEE International Magnetics Conference. editor / J. Fidler ; B. Hillebrands ; C. Ross ; D. Weller ; L. Folks ; E. Hill ; M. Vazquez Villalabeitia ; J. A. Bain ; Jo De Boeck ; R. Wood. Institute of Electrical and Electronics Engineers Inc., 2002.

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