Abstract
In this contribution, we report on the preparation of high-resolution MFM tips using the EBD-method for MFM measurements on soft magnetic samples. Electron beam lithography (EBL) using a scanning electron microscope (SEM) was used to define small particles of magnetic material at the very end of a commercial scanning microscope tip to achieve maximum lateral resolution with low magnetic moment.
| Original language | English |
|---|---|
| Title of host publication | INTERMAG Europe 2002 - IEEE International Magnetics Conference |
| Editors | J. Fidler, B. Hillebrands, C. Ross, D. Weller, L. Folks, E. Hill, M. Vazquez Villalabeitia, J. A. Bain, Jo De Boeck, R. Wood |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| ISBN (Electronic) | 0780373650, 9780780373655 |
| DOIs | |
| Publication status | Published - 2002 Jan 1 |
| Externally published | Yes |
| Event | 2002 IEEE International Magnetics Conference, INTERMAG Europe 2002 - Amsterdam, Netherlands Duration: 2002 Apr 28 → 2002 May 2 |
Other
| Other | 2002 IEEE International Magnetics Conference, INTERMAG Europe 2002 |
|---|---|
| Country | Netherlands |
| City | Amsterdam |
| Period | 02/4/28 → 02/5/2 |
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ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering
- Surfaces, Coatings and Films
Cite this
Development of high-resolution MFM-tips. / Koblischka, Michael Rudolf; Müller, A. N.; Hartmann, U.; Sulzback, T.; Dodd, P.
INTERMAG Europe 2002 - IEEE International Magnetics Conference. ed. / J. Fidler; B. Hillebrands; C. Ross; D. Weller; L. Folks; E. Hill; M. Vazquez Villalabeitia; J. A. Bain; Jo De Boeck; R. Wood. Institute of Electrical and Electronics Engineers Inc., 2002. 1001100.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Development of high-resolution MFM-tips
AU - Koblischka, Michael Rudolf
AU - Müller, A. N.
AU - Hartmann, U.
AU - Sulzback, T.
AU - Dodd, P.
PY - 2002/1/1
Y1 - 2002/1/1
N2 - In this contribution, we report on the preparation of high-resolution MFM tips using the EBD-method for MFM measurements on soft magnetic samples. Electron beam lithography (EBL) using a scanning electron microscope (SEM) was used to define small particles of magnetic material at the very end of a commercial scanning microscope tip to achieve maximum lateral resolution with low magnetic moment.
AB - In this contribution, we report on the preparation of high-resolution MFM tips using the EBD-method for MFM measurements on soft magnetic samples. Electron beam lithography (EBL) using a scanning electron microscope (SEM) was used to define small particles of magnetic material at the very end of a commercial scanning microscope tip to achieve maximum lateral resolution with low magnetic moment.
UR - http://www.scopus.com/inward/record.url?scp=85017204836&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85017204836&partnerID=8YFLogxK
U2 - 10.1109/INTMAG.2002.1001100
DO - 10.1109/INTMAG.2002.1001100
M3 - Conference contribution
AN - SCOPUS:85017204836
BT - INTERMAG Europe 2002 - IEEE International Magnetics Conference
A2 - Fidler, J.
A2 - Hillebrands, B.
A2 - Ross, C.
A2 - Weller, D.
A2 - Folks, L.
A2 - Hill, E.
A2 - Vazquez Villalabeitia, M.
A2 - Bain, J. A.
A2 - De Boeck, Jo
A2 - Wood, R.
PB - Institute of Electrical and Electronics Engineers Inc.
ER -