Development of highly efficient micro energy harvesters with MgHf-codoped AlN piezoelectric films

Hung H. Nguyen, Le Van Minh, Hiroyuki Oguchi, Hiroki Kuwano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

This paper presents the development of high power-density vibration micro energy harvesters (VEHs) exploiting MgHf-codoped AlN ((MgHf)xAl1-xN) piezoelectric films. The devices provided a significant improvement in performance of micro-energy harvesters. A normalized power density (NPD) of 34.9 mW.g-2.cm-3 was increased 18-fold than that of the best published AlN-based device. The devices in this study consisted of a (MgHf)xAl1-xN/Si cantilever and a W/Si proof-mass. Our piezoelectric films with MgHf dopant of χ = 0, 0.05, and 0.10 were grown successfully on Pt/Ti/SOI substrates by an ion-beam sputtering using an AlN and a MgHf targets in Ar/N2 ambient. The films offered a power-generation figure of merit (FoM) of 22 GPa, which is 3-fold larger than that of AlN. The results confirmed the high potential of (MgHf)xAl1-xN-based VEHs as power sources for wireless sensor networks (WSNs) crucial to realize Internet of Things (IoT).

Original languageEnglish
Title of host publication2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages222-225
Number of pages4
ISBN (Electronic)9781538647820
DOIs
Publication statusPublished - 2018 Apr 24
Externally publishedYes
Event31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom
Duration: 2018 Jan 212018 Jan 25

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2018-January
ISSN (Print)1084-6999

Conference

Conference31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
CountryUnited Kingdom
CityBelfast
Period18/1/2118/1/25

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Nguyen, H. H., Van Minh, L., Oguchi, H., & Kuwano, H. (2018). Development of highly efficient micro energy harvesters with MgHf-codoped AlN piezoelectric films. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 (pp. 222-225). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2018.8346524