Development of inorganic silica reverse osmosis membranes by using a counter-diffusion chemical vapor deposition method

Ayumi Ikeda, Emi Matsuyama, Makoto Komatsuzaki, Misa Sasaki, Mikihiro Nomura

Research output: Contribution to journalConference article

5 Citations (Scopus)


Silica hybrid membranes have been developed for use as reverse osmosis (RO) membranes by using a counter-diffusion chemical vapor deposition (CVD) method. A silica source (phenyltrimethoxysilane; PhTMOS) and O3 were provided at opposite sides of a porous alumina substrate at 300°C for 90 min. The RO permeation test was conducted for 100 mg L-1 NaCl at 3.0 MPa. The highest NaCl rejection was 94.2% for a total flux of 1.7 kg m-2 h-1. The module length is an important factor in obtaining highly selective RO membranes. The short module (6 cm) was better because of the higher O3 concentration in the module. The decomposition conditions of phenyl groups on the silica surface are discussed for the hydrolysis powder of PhTMOS. According to FT-IR measurements, phenyl groups remained on the silica surface after O3 treatment for 90 min at 300°C, whereas the number of silanol groups decreased by approximately 30% upon O3 treatment at 300°C. The high Na+ rejection can be explained by the reduction of the silanol groups in the membrane.

Original languageEnglish
Pages (from-to)574-578
Number of pages5
JournalJournal of Chemical Engineering of Japan
Issue number7 SPECIAL ISSUE
Publication statusPublished - 2014 Jan 1
EventInternational Symposium on Innovative Materials for Processes in Energy Systems, IMPRES 2013 - Fukuoka, Japan
Duration: 2013 Sep 42013 Sep 6



  • Counter diffusion CVD method
  • Inorganic RO membranes
  • Phenyltrimethoxysilane

ASJC Scopus subject areas

  • Chemistry(all)
  • Chemical Engineering(all)

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