Development of MEMS pierce-type nanocrystalline Si electron-emitter array for massively parallel electron beam direct writing

Hitoshi Nishino, Shinya Yoshida, Akira Kojima, Naokatsu Ikegami, Nobuyoshi Koshida, Shuji Tanaka, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

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