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Development of micromachining technology in ion microbeam system at TIARA, JAEA
T. Kamiya, H. Nishikawa, T. Satoh, J. Haga, M. Oikawa, Y. Ishii, T. Ohkubo, N. Uchiya, Y. Furuta
Research output: Contribution to journal › Article › peer-review
4
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(Scopus)