Abstract
In parallel with down-sizing of electrical devices and products, manufacturing is forced to be also miniatured to fabricate small-sized electrical parts with the geometric size in millimeters. This type of micro-stamping, suffers from two issues: stamping in dry with strict accuracy in clearance. Residual lubricating oils and cleansing agents are completely disliked by electrical parts; elimination of these oils and agents becomes difficult and costly task after stamping. Since the clearance is designed to be much less than 5% of sheet material thickness, the conventional hard coating has a risk of break-away, or, the formability in stamping is significantly shortened. Nano-columnar carbon coating is developed to solve the above two issues in micro-stamping. Amorphous carbon coating is employed as a starting film. Electron-beam irradiation is performed to chemically modify this microstructure having a fine nano-structured columnar composite. After precise HRTEM observation and Raman spectroscopy, this nano-columnar carbon film is found to be composed of graphitized inter-columnar network with amorphous columns. Nano-indentation proves that this film has remarkable reversibility in deformation up to 8 to 10% of film thickness after loading and unloading. The scratching test verifies that this coating has sufficiently high resistance over 100 N. Furthermore, a micro-stamping test is designed and performed to demonstrate the feasibility of this coating in practical operation.
| Original language | English |
|---|---|
| Pages (from-to) | 1177-1181 |
| Number of pages | 5 |
| Journal | Surface and Coatings Technology |
| Volume | 202 |
| Issue number | 4-7 |
| DOIs | |
| Publication status | Published - 2007 Dec 15 |
| Externally published | Yes |
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Keywords
- Amorphous carbon film
- Dry precise stamping
- Electron beam irradiation
- Nano-columnar structure
- Reversible deformability
- Sputtering
ASJC Scopus subject areas
- Surfaces, Coatings and Films
- Condensed Matter Physics
- Surfaces and Interfaces
Cite this
Development of nano-columnar carbon coating for dry micro-stamping. / Aizawa, Tatsuhiko; Iwamura, Eiji; Itoh, Kuniyoshi.
In: Surface and Coatings Technology, Vol. 202, No. 4-7, 15.12.2007, p. 1177-1181.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Development of nano-columnar carbon coating for dry micro-stamping
AU - Aizawa, Tatsuhiko
AU - Iwamura, Eiji
AU - Itoh, Kuniyoshi
PY - 2007/12/15
Y1 - 2007/12/15
N2 - In parallel with down-sizing of electrical devices and products, manufacturing is forced to be also miniatured to fabricate small-sized electrical parts with the geometric size in millimeters. This type of micro-stamping, suffers from two issues: stamping in dry with strict accuracy in clearance. Residual lubricating oils and cleansing agents are completely disliked by electrical parts; elimination of these oils and agents becomes difficult and costly task after stamping. Since the clearance is designed to be much less than 5% of sheet material thickness, the conventional hard coating has a risk of break-away, or, the formability in stamping is significantly shortened. Nano-columnar carbon coating is developed to solve the above two issues in micro-stamping. Amorphous carbon coating is employed as a starting film. Electron-beam irradiation is performed to chemically modify this microstructure having a fine nano-structured columnar composite. After precise HRTEM observation and Raman spectroscopy, this nano-columnar carbon film is found to be composed of graphitized inter-columnar network with amorphous columns. Nano-indentation proves that this film has remarkable reversibility in deformation up to 8 to 10% of film thickness after loading and unloading. The scratching test verifies that this coating has sufficiently high resistance over 100 N. Furthermore, a micro-stamping test is designed and performed to demonstrate the feasibility of this coating in practical operation.
AB - In parallel with down-sizing of electrical devices and products, manufacturing is forced to be also miniatured to fabricate small-sized electrical parts with the geometric size in millimeters. This type of micro-stamping, suffers from two issues: stamping in dry with strict accuracy in clearance. Residual lubricating oils and cleansing agents are completely disliked by electrical parts; elimination of these oils and agents becomes difficult and costly task after stamping. Since the clearance is designed to be much less than 5% of sheet material thickness, the conventional hard coating has a risk of break-away, or, the formability in stamping is significantly shortened. Nano-columnar carbon coating is developed to solve the above two issues in micro-stamping. Amorphous carbon coating is employed as a starting film. Electron-beam irradiation is performed to chemically modify this microstructure having a fine nano-structured columnar composite. After precise HRTEM observation and Raman spectroscopy, this nano-columnar carbon film is found to be composed of graphitized inter-columnar network with amorphous columns. Nano-indentation proves that this film has remarkable reversibility in deformation up to 8 to 10% of film thickness after loading and unloading. The scratching test verifies that this coating has sufficiently high resistance over 100 N. Furthermore, a micro-stamping test is designed and performed to demonstrate the feasibility of this coating in practical operation.
KW - Amorphous carbon film
KW - Dry precise stamping
KW - Electron beam irradiation
KW - Nano-columnar structure
KW - Reversible deformability
KW - Sputtering
UR - http://www.scopus.com/inward/record.url?scp=36049003084&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=36049003084&partnerID=8YFLogxK
U2 - 10.1016/j.surfcoat.2007.05.059
DO - 10.1016/j.surfcoat.2007.05.059
M3 - Article
AN - SCOPUS:36049003084
VL - 202
SP - 1177
EP - 1181
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
IS - 4-7
ER -