Development of nano-columnar carbon coating for dry micro-stamping

Tatsuhiko Aizawa, Eiji Iwamura, Kuniyoshi Itoh

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

In parallel with down-sizing of electrical devices and products, manufacturing is forced to be also miniatured to fabricate small-sized electrical parts with the geometric size in millimeters. This type of micro-stamping, suffers from two issues: stamping in dry with strict accuracy in clearance. Residual lubricating oils and cleansing agents are completely disliked by electrical parts; elimination of these oils and agents becomes difficult and costly task after stamping. Since the clearance is designed to be much less than 5% of sheet material thickness, the conventional hard coating has a risk of break-away, or, the formability in stamping is significantly shortened. Nano-columnar carbon coating is developed to solve the above two issues in micro-stamping. Amorphous carbon coating is employed as a starting film. Electron-beam irradiation is performed to chemically modify this microstructure having a fine nano-structured columnar composite. After precise HRTEM observation and Raman spectroscopy, this nano-columnar carbon film is found to be composed of graphitized inter-columnar network with amorphous columns. Nano-indentation proves that this film has remarkable reversibility in deformation up to 8 to 10% of film thickness after loading and unloading. The scratching test verifies that this coating has sufficiently high resistance over 100 N. Furthermore, a micro-stamping test is designed and performed to demonstrate the feasibility of this coating in practical operation.

Original languageEnglish
Pages (from-to)1177-1181
Number of pages5
JournalSurface and Coatings Technology
Volume202
Issue number4-7
DOIs
Publication statusPublished - 2007 Dec 15
Externally publishedYes

Fingerprint

stamping
Stamping
Carbon
coatings
Coatings
carbon
clearances
lubricating oils
boundary layer separation
Hard coatings
Lubricating oils
Carbon films
unloading
sizing
Amorphous carbon
high resistance
Nanoindentation
Formability
nanoindentation
Unloading

Keywords

  • Amorphous carbon film
  • Dry precise stamping
  • Electron beam irradiation
  • Nano-columnar structure
  • Reversible deformability
  • Sputtering

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Development of nano-columnar carbon coating for dry micro-stamping. / Aizawa, Tatsuhiko; Iwamura, Eiji; Itoh, Kuniyoshi.

In: Surface and Coatings Technology, Vol. 202, No. 4-7, 15.12.2007, p. 1177-1181.

Research output: Contribution to journalArticle

Aizawa, Tatsuhiko ; Iwamura, Eiji ; Itoh, Kuniyoshi. / Development of nano-columnar carbon coating for dry micro-stamping. In: Surface and Coatings Technology. 2007 ; Vol. 202, No. 4-7. pp. 1177-1181.
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