Abstract
We developed a stage-scanning system for confocal scanning transmission electron microscopy (confocal STEM), which enables us to perform STEM under a fixed lens configuration without a beam-scanning system. A specimen holder with a piezo-driven stage was modified and controlled by a computer program for stage scanning. The signals of transmitted electrons detected by an STEM detector were displayed on a computer screen and were synchronized with the voltage supplied to the piezoelectric devices used for stage positioning, which consequently produced a, stage-scanning STEM image. Furthermore, we evaluated the stability of the developed stage-scanning STEM system and the resolution of the obtained images. 0.2 nm lattice firings could be observed in Au particles, which indicated that this system could demonstrate atomic-resolution STEM imaging at desired z positions. This is attributed to the small specimen drift, stable stage scanning and the computer program developed for stage axis corrections. Finally, we applied this stage-scanning system to confocal imaging.
| Original language | English |
|---|---|
| Pages (from-to) | 111-114 |
| Number of pages | 4 |
| Journal | e-Journal of Surface Science and Nanotechnology |
| Volume | 6 |
| DOIs | |
| Publication status | Published - 2008 Apr 12 |
| Externally published | Yes |
Keywords
- Confocal imaging
- Piezo-driven specimen stage
- Scanning transmission electron microscopy
- Stage-scanning system
ASJC Scopus subject areas
- Biotechnology
- Bioengineering
- Condensed Matter Physics
- Mechanics of Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films