Development of stage-scanning system for confocal scanning transmission electron microscopy

Ayako Hashimoto, Masaki Takeguchi, Masayuki Shimojo, Kazutaka Mitsuishi, Miyoko Tanaka, Kazuo Furuya

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

We developed a stage-scanning system for confocal scanning transmission electron microscopy (confocal STEM), which enables us to perform STEM under a fixed lens configuration without a beam-scanning system. A specimen holder with a piezo-driven stage was modified and controlled by a computer program for stage scanning. The signals of transmitted electrons detected by an STEM detector were displayed on a computer screen and were synchronized with the voltage supplied to the piezoelectric devices used for stage positioning, which consequently produced a, stage-scanning STEM image. Furthermore, we evaluated the stability of the developed stage-scanning STEM system and the resolution of the obtained images. 0.2 nm lattice firings could be observed in Au particles, which indicated that this system could demonstrate atomic-resolution STEM imaging at desired z positions. This is attributed to the small specimen drift, stable stage scanning and the computer program developed for stage axis corrections. Finally, we applied this stage-scanning system to confocal imaging.

Original languageEnglish
Pages (from-to)111-114
Number of pages4
Journale-Journal of Surface Science and Nanotechnology
Volume6
DOIs
Publication statusPublished - 2008 Apr 12
Externally publishedYes

Fingerprint

Transmission electron microscopy
Scanning
transmission electron microscopy
Scanning electron microscopy
scanning electron microscopy
scanning
Computer program listings
Piezoelectric devices
computer programs
Imaging techniques
holders
positioning
Lenses
lenses
Detectors
Electrons
detectors
Electric potential
electric potential
configurations

Keywords

  • Confocal imaging
  • Piezo-driven specimen stage
  • Scanning transmission electron microscopy
  • Stage-scanning system

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Materials Science (miscellaneous)

Cite this

Development of stage-scanning system for confocal scanning transmission electron microscopy. / Hashimoto, Ayako; Takeguchi, Masaki; Shimojo, Masayuki; Mitsuishi, Kazutaka; Tanaka, Miyoko; Furuya, Kazuo.

In: e-Journal of Surface Science and Nanotechnology, Vol. 6, 12.04.2008, p. 111-114.

Research output: Contribution to journalArticle

Hashimoto, Ayako ; Takeguchi, Masaki ; Shimojo, Masayuki ; Mitsuishi, Kazutaka ; Tanaka, Miyoko ; Furuya, Kazuo. / Development of stage-scanning system for confocal scanning transmission electron microscopy. In: e-Journal of Surface Science and Nanotechnology. 2008 ; Vol. 6. pp. 111-114.
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