Dielectric and electrical properties of amorphous La1-XTaXOY films as higher-k gate insulators

Y.Zhao Y.Zhao, K.Kita K.Kita, K.Kyuno K.Kyuno, A.Toriumi A.Toriumi, Kentaro Kyuno

Research output: Contribution to journalArticle

Original languageEnglish
JournalJournal of Applied Physics
Volume105
Publication statusPublished - 2009 Mar 1

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