Dielectric and electrical properties of amorphous La1-XTaXOY films as higher-k gate insulators

Y.Zhao Y.Zhao, K.Kita K.Kita, K.Kyuno K.Kyuno, A.Toriumi A.Toriumi, Kentaro Kyuno

Research output: Contribution to journalArticle

Original languageEnglish
JournalJournal of Applied Physics
Volume105
Publication statusPublished - 2009 Mar 1

Cite this

Dielectric and electrical properties of amorphous La1-XTaXOY films as higher-k gate insulators. / Y.Zhao, Y.Zhao; K.Kita, K.Kita; K.Kyuno, K.Kyuno; A.Toriumi, A.Toriumi; Kyuno, Kentaro.

In: Journal of Applied Physics, Vol. 105, 01.03.2009.

Research output: Contribution to journalArticle

Y.Zhao, Y.Zhao ; K.Kita, K.Kita ; K.Kyuno, K.Kyuno ; A.Toriumi, A.Toriumi ; Kyuno, Kentaro. / Dielectric and electrical properties of amorphous La1-XTaXOY films as higher-k gate insulators. In: Journal of Applied Physics. 2009 ; Vol. 105.
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