Original language | English |
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Pages (from-to) | 794-795 |
Journal | Extended Abstracts of 2004 International Conference on Solid State Devices and Materials (SSDM) |
Publication status | Published - 2004 Sep 1 |
Dielectric Constant Increase of Yttrium-Doped HfO2 by Structural Phase Modification
K Kita, K Kyuno, A toriumi
Research output: Contribution to journal › Article › peer-review