Dielectric Constant Increase of Yttrium-Doped HfO2 by Structural Phase Modification

K Kita, K Kyuno, A toriumi

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)794-795
JournalExtended Abstracts of 2004 International Conference on Solid State Devices and Materials (SSDM)
Publication statusPublished - 2004 Sep 1

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