Direct acquisition of interferogram by stage scanning in electron interferometry

Dan Lei, Kazutaka Mitsuishi, Ken Harada, Masayuki Shimojo, Dongying Ju, Masaki Takeguchi

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

We present an electron holography technique to acquire an interferogram, that is, cosine image of phase distribution. The interferogram is constructed by shifting the specimen in one direction with a stage-scanning system and acquiring line intensities of holograms. Taking line intensities eliminates the carrier fringes in the holograms and yields the interferogram. Under phase object approximation, the object phase can be readily obtained from the interferogram without any reconstruction procedure. The spatial resolution of phase is determined independently of the fringe spacing, overcoming the limitation of conventional techniques based on the Fourier transformation method.

Original languageEnglish
Pages (from-to)563-570
Number of pages8
JournalJournal of Electron Microscopy
Volume62
Issue number6
DOIs
Publication statusPublished - 2013 Dec

Keywords

  • electron holography
  • fringe spacing
  • interferogram
  • phase shift
  • spatial resolution
  • stage scanning

ASJC Scopus subject areas

  • Instrumentation

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