Direct bonding between quaternary compound semiconductor and garnet crystals for integrated optical isolator

Hideki Yokoi, Tetsuya Mizumoto, Masafumi Shimizu, Naoki Futakuchi, Noriaki Kaida, Yoshiaki Nakano

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Abstract

An integrated optical isolator employing a nonreciprocal phase shift is very attractive because it does not need phase matching. We have investigated a novel configuration of the integrated optical isolator, employing the nonreciprocal phase shift, in which the magnetooptic waveguide has a magnetic garnet/GalnAsP/InP structure. The wafer direct bonding technique is necessary to realize this structure. The direct bonding between quaternary III-V compound semiconductors and garnet crystals was experimentally studied. The bonding was achieved by chemical treatment and subsequent heat treatment at temperatures ranging from 110 to 330°C. Cross-sectional scanning electron microscope (SEM) images indicated that there were no gaps between the two wafers in contact.

Original languageEnglish
Pages (from-to)195-197
Number of pages3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume38
Issue number1
DOIs
Publication statusPublished - 1999 Jan 1
Externally publishedYes

Keywords

  • Magnetic garnets
  • Optical isolator
  • SEM
  • Semiconductor
  • Wafer direct bonding

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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