Direct etching and implanted metalization in soft matter

K. Ichikawa, Y. Fukuyama, S. Maeda, Y. Yamanishi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have successfully carried out direct implantable metallization (plating) on soft polymer such as PDMS using electrically induced microbubbles. Novelties of this technology is; 1. No requirement of complicated pretreatment procedure on the surface of any substrate before plating and which is unlike the non-electrolytic plating, 2. Resolution of the plating can be reached to several-tens micron within short time with low cost, 3. Robust metallization on wide range of material locally and precisely without any masks and so on. We evaluated robustness and resolution of metallization in our method.

Original languageEnglish
Title of host publication21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017
PublisherChemical and Biological Microsystems Society
Pages421-422
Number of pages2
ISBN (Electronic)9780692941836
Publication statusPublished - 2020
Event21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017 - Savannah, United States
Duration: 2017 Oct 222017 Oct 26

Publication series

Name21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017

Conference

Conference21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017
CountryUnited States
CitySavannah
Period17/10/2217/10/26

Keywords

  • Metallization
  • Microbubbles
  • Plating

ASJC Scopus subject areas

  • Chemical Engineering (miscellaneous)
  • Bioengineering

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