TY - JOUR
T1 - Direct growth of single carbon nanofiber onto tip of scanning probe microscopy induced by ion irradiation
AU - Tanemura, Masaki
AU - Kitazawa, Masashi
AU - Tanaka, Junya
AU - Okita, Tatsuhiko
AU - Ohta, Ryo
AU - Miao, Lei
AU - Tanemura, Sakae
N1 - Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2006/3/27
Y1 - 2006/3/27
N2 - A novel method for the direct growth of a single carbon nanofiber (CNF) onto the tip of a commercially available scanning probe microscope (SPM) using Ar+-ion irradiation was demonstrated. This method was proposed on the basis of the experimental fact that the Ar+ ion bombardment of carbon coated substrates induced the formation of conical protrusions that possessed a single CNF at their tip. Commercially available Si SPM tips were coated with carbon and then were Ar+-ion bombarded at room temperature and at 200°C. On the ion-bombarded SPM tips, single CNFs of about 30 nm in diameter grew. Their length, which was controlled by varying the sputtering duration, was typically 0.5-1.5 μm. Using the CNF-tipped probes thus prepared, clear atomic force microscope (AFM) images with a high spatial resolution were attained for Si-grating samples. No deterioration in the spatial resolution was detected after repeated scans for 90 min. Thus, the ion-irradiation method was concluded to be quite promising for the fabrication of practical CNF-tipped SPM probes.
AB - A novel method for the direct growth of a single carbon nanofiber (CNF) onto the tip of a commercially available scanning probe microscope (SPM) using Ar+-ion irradiation was demonstrated. This method was proposed on the basis of the experimental fact that the Ar+ ion bombardment of carbon coated substrates induced the formation of conical protrusions that possessed a single CNF at their tip. Commercially available Si SPM tips were coated with carbon and then were Ar+-ion bombarded at room temperature and at 200°C. On the ion-bombarded SPM tips, single CNFs of about 30 nm in diameter grew. Their length, which was controlled by varying the sputtering duration, was typically 0.5-1.5 μm. Using the CNF-tipped probes thus prepared, clear atomic force microscope (AFM) images with a high spatial resolution were attained for Si-grating samples. No deterioration in the spatial resolution was detected after repeated scans for 90 min. Thus, the ion-irradiation method was concluded to be quite promising for the fabrication of practical CNF-tipped SPM probes.
KW - CNF-probe
KW - Carbon nanofiber (CNF)
KW - Scanning probe microscope (SPM)
KW - Sputtering
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U2 - 10.1143/JJAP.45.2004
DO - 10.1143/JJAP.45.2004
M3 - Article
AN - SCOPUS:33645500314
VL - 45
SP - 2004
EP - 2008
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 3 B
ER -