Direct patterning of nanostructures by electron beam induced deposition with a sub-nanometer probe

K. Furuya, K. Mitsuishi, M. Shimojo, M. Song, M. Tanaka, M. Takeguchi

Research output: Contribution to journalArticle

Original languageEnglish
JournalDefault journal
Publication statusPublished - 2004 May 1

Cite this

Direct patterning of nanostructures by electron beam induced deposition with a sub-nanometer probe. / Furuya, K.; Mitsuishi, K.; Shimojo, M.; Song, M.; Tanaka, M.; Takeguchi, M.

In: Default journal, 01.05.2004.

Research output: Contribution to journalArticle

@article{b105aa4fc19f4dc5a3f9037b4b502810,
title = "Direct patterning of nanostructures by electron beam induced deposition with a sub-nanometer probe",
author = "K. Furuya and K. Mitsuishi and M. Shimojo and M. Song and M. Tanaka and M. Takeguchi",
year = "2004",
month = "5",
day = "1",
language = "English",
journal = "Default journal",

}

TY - JOUR

T1 - Direct patterning of nanostructures by electron beam induced deposition with a sub-nanometer probe

AU - Furuya, K.

AU - Mitsuishi, K.

AU - Shimojo, M.

AU - Song, M.

AU - Tanaka, M.

AU - Takeguchi, M.

PY - 2004/5/1

Y1 - 2004/5/1

M3 - Article

JO - Default journal

JF - Default journal

ER -