Abstract
In this paper, a fabrication method for a hybrid structure of the poly-N-Isopropylacrylamide (pNIPAAm) gel as a soft material and the SU-8 as a solid material is proposed. This pNIPAAm-SU8 hybrid structure can be applied to various applications such as gel actuators. These hybrid structures have a serious problem that it is easily broken by the difference of swelling rate. Our proposed hybrid structure was not broken though repeating swelling-shrinking states for 10 or more times. A small displacement of the gel is occurred by the phase transition, then it is magnified by combining with the SU-8 solid structure. We demonstrated that the expanded tip displacement of the SU-8 solid structure reached 145μm.
Original language | English |
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Title of host publication | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 1082-1085 |
Number of pages | 4 |
Volume | 2015-February |
Edition | February |
DOIs | |
Publication status | Published - 2015 Feb 26 |
Event | 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: 2015 Jan 18 → 2015 Jan 22 |
Other
Other | 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 |
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Country | Portugal |
City | Estoril |
Period | 15/1/18 → 15/1/22 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Mechanical Engineering
- Condensed Matter Physics
- Electronic, Optical and Magnetic Materials