Effect of chlorine distribution profiles of tribological properties for chlorine-implanted titanium nitride films.

A. Mitsuo, T. Aizawa

Research output: Contribution to journal › Article › peer-review

Cite this

@article{98e030a307b94c22bd77184806a77307,

title = "Effect of chlorine distribution profiles of tribological properties for chlorine-implanted titanium nitride films.",

author = "A. Mitsuo and T. Aizawa",

year = "2002",

month = apr,

day = "1",

language = "English",

volume = "158-159 (2002)",

pages = "694--698",

journal = "Surface Coating Technology.",

}