Effect of chlorine distribution profiles of tribological properties for chlorine-implanted titanium nitride films.

A. Mitsuo, T. Aizawa

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)
Original languageEnglish
Pages (from-to)694-698
JournalSurface Coating Technology.
Volume158-159 (2002)
Publication statusPublished - 2002 Apr 1

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