Effect of chlorine distribution profiles of tribological properties for chlorine-implanted titanium nitride films.

A. Mitsuo, T. Aizawa

Research output: Contribution to journalArticle

9 Citations (Scopus)
Original languageEnglish
Pages (from-to)694-698
JournalSurface Coating Technology.
Volume158-159 (2002)
Publication statusPublished - 2002 Apr 1

Cite this

Effect of chlorine distribution profiles of tribological properties for chlorine-implanted titanium nitride films. / Mitsuo, A.; Aizawa, T.

In: Surface Coating Technology., Vol. 158-159 (2002), 01.04.2002, p. 694-698.

Research output: Contribution to journalArticle

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title = "Effect of chlorine distribution profiles of tribological properties for chlorine-implanted titanium nitride films.",
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AU - Mitsuo, A.

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Y1 - 2002/4/1

M3 - Article

VL - 158-159 (2002)

SP - 694

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JO - Surface Coating Technology.

JF - Surface Coating Technology.

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