Effect of O2 and CO2 Gases Addition on Hardness of Ultra Water Repellent Film Prepared by MPECVD

H.Sakurai H.Sakurai, T.Ishizaki T.Ishizaki, N.Saito N.Saito, O.Takai O.Takai, Takahiro Ishizaki

Research output: Contribution to journalArticle

Original languageEnglish
JournalDefault journal
Publication statusPublished - 2008

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