Effect of O2 and CO2 Gases Addition on Hardness of Ultra Water Repellent Film Prepared by MPECVD

H.Sakurai H.Sakurai, T.Ishizaki T.Ishizaki, N.Saito N.Saito, O.Takai O.Takai, Takahiro Ishizaki

Research output: Contribution to journalArticle

Original languageEnglish
JournalDefault journal
Publication statusPublished - 2008

Cite this

Effect of O2 and CO2 Gases Addition on Hardness of Ultra Water Repellent Film Prepared by MPECVD. / H.Sakurai, H.Sakurai; T.Ishizaki, T.Ishizaki; N.Saito, N.Saito; O.Takai, O.Takai; Ishizaki, Takahiro.

In: Default journal, 2008.

Research output: Contribution to journalArticle

H.Sakurai, H.Sakurai ; T.Ishizaki, T.Ishizaki ; N.Saito, N.Saito ; O.Takai, O.Takai ; Ishizaki, Takahiro. / Effect of O2 and CO2 Gases Addition on Hardness of Ultra Water Repellent Film Prepared by MPECVD. In: Default journal. 2008.
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