Original language | English |
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Journal | Default journal |
Publication status | Published - 2008 |
Effect of O2 and CO2 Gases Addition on Hardness of Ultra Water Repellent Film Prepared by MPECVD
H.Sakurai H.Sakurai, T.Ishizaki T.Ishizaki, N.Saito N.Saito, O.Takai O.Takai, Takahiro Ishizaki
Research output: Contribution to journal › Article › peer-review