Effect of Plenum Chamber Configuration on Airflow Uniformity in Uni-directional Flow Cleanrooms

Guoping Xie, Yoshihide Suwa

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)21
Number of pages27
JournalJournal of the IEST
Volume37
Issue number4
Publication statusPublished - 1995

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