Effect of pulse bias voltage and nitrogen pressure on nitrogen distribution in steel substrate by plasma immersion ion implantation of nitrogen

Atsusshi Mitsuo, S. Uchida, T. Aizawa

Research output: Contribution to journalArticlepeer-review

23 Citations (Scopus)

Fingerprint Dive into the research topics of 'Effect of pulse bias voltage and nitrogen pressure on nitrogen distribution in steel substrate by plasma immersion ion implantation of nitrogen'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy