Effect of RIE Damage to Blue and Green Light Emitting Diodes

N. Nakada, M. Nakaji, H. Ishikawa, T. Egawa, T. Jimbo, M. Umeno

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)TuP16
JournalDefault journal
Publication statusPublished - 2000 Mar 1

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