Effect of treatment temperature on surface wettability of methylcyclosiloxane layer formed by chemical vapor deposition

Takahiro Ishizaki, Keisuke Sasagawa, Takuya Furukawa, Sou Kumagai, Erina Yamamoto, Satoshi Chiba, Naosumi Kamiyama, Takayoshi Kiguchi

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Engineering & Materials Science

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Chemical Compounds