Effects of heat treatment on electric properties of nanorods formed by electron beam-induced deposition

Masayuki Shimojo, Masaki Takeguchi, Renchao Che, Wei Zhang, Miyoko Tanaka, Kazutaka Mitsuishi, Kazuo Furuya

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6 Citations (Scopus)


Nanometer-sized rods were fabricated by an electron beam-induced deposition technique with iron pentacarbonyl. The electric properties of the as-deposited and heat-treated nanorods were measured in situ using a transmission electron microscope. The obtained current-voltage curve showed a nonlinear characteristic, and the resistivity was in the order of 10-2 Ω m in the case of the as-deposited nanorods. After a heat treatment at 600°C in vacuum, the nanorods transformed to α-Fe, and a resistivity of approximately 10-6Οm and a metallic characteristic were obtained. This suggests that position- and shape-controlled metallic nanowires can be formed by electron beam-induced deposition combined with heat treatment.

Original languageEnglish
Pages (from-to)5509-5512
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Issue number6 B
Publication statusPublished - 2006 Jun 20



  • Electric property
  • Electron beam-induced deposition
  • Heat treatment
  • Iron pentacarbonyl
  • Nanowire
  • Resistivity

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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