Electroforming of Ni mold using high-aspect-ratio PMMA microstructures fabricated by proton beam writing

Yusuke Tanabe, Hiroyuki Nishikawa, Takahiro Satoh, Yasuyuki Ishii, Tomihiro Kamiya, Tohru Watanabe, Atsushi Sekiguchi

Research output: Contribution to journalArticle

Original languageEnglish
Journal36th International Conference on Micro & Nano Engineering (MNE),(Genoa, Italy, 19-22 September 2010)
Publication statusPublished - 2010 Sep 1

Cite this

@article{4991ddf2361a4218a07255ff3efd2416,
title = "Electroforming of Ni mold using high-aspect-ratio PMMA microstructures fabricated by proton beam writing",
author = "Yusuke Tanabe and Hiroyuki Nishikawa and Takahiro Satoh and Yasuyuki Ishii and Tomihiro Kamiya and Tohru Watanabe and Atsushi Sekiguchi",
year = "2010",
month = "9",
day = "1",
language = "English",
journal = "36th International Conference on Micro & Nano Engineering (MNE),(Genoa, Italy, 19-22 September 2010)",

}

TY - JOUR

T1 - Electroforming of Ni mold using high-aspect-ratio PMMA microstructures fabricated by proton beam writing

AU - Tanabe, Yusuke

AU - Nishikawa, Hiroyuki

AU - Satoh, Takahiro

AU - Ishii, Yasuyuki

AU - Kamiya, Tomihiro

AU - Watanabe, Tohru

AU - Sekiguchi, Atsushi

PY - 2010/9/1

Y1 - 2010/9/1

M3 - Article

JO - 36th International Conference on Micro & Nano Engineering (MNE),(Genoa, Italy, 19-22 September 2010)

JF - 36th International Conference on Micro & Nano Engineering (MNE),(Genoa, Italy, 19-22 September 2010)

ER -