Electroforming of Ni mold using high-aspect-ratio PMMA microstructures fabricated by proton beam writing

Yusuke Tanabe, Hiroyuki Nishikawa, Takahiro Satoh, Yasuyuki Ishii, Tomihiro Kamiya, Tohru Watanabe, Atsushi Sekiguchi

Research output: Contribution to journalArticle

Original languageEnglish
Journal36th International Conference on Micro & Nano Engineering (MNE),(Genoa, Italy, 19-22 September 2010)
Publication statusPublished - 2010 Sep 1

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