Electroless NiB Liner on Organosilane Layers

H. Aramaki, M. Yoshino, I. Matsuda, K. Ueno, Y. Shacham-Diam, T. Osaka

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)108-109
JournalAdvanced Metallization Conference 2008, Asian Session Abstracts
Publication statusPublished - 2008 Oct 8

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Aramaki, H., Yoshino, M., Matsuda, I., Ueno, K., Shacham-Diam, Y., & Osaka, T. (2008). Electroless NiB Liner on Organosilane Layers. Advanced Metallization Conference 2008, Asian Session Abstracts, 108-109.