Electron beam induced chemical vapor deposition of metal nano-dots with transmission electron microscopy

M. Tanaka, M. Shimojo, M. Takeguchi, K. Mitsuishi [Unknown], K. Furuya

Research output: Contribution to journal › Article

@article{2bf25960128c4636b50db18215a1b54d,

title = "Electron beam induced chemical vapor deposition of metal nano-dots with transmission electron microscopy",

author = "M. Tanaka and M. Shimojo and M. Takeguchi and [Unknown], {K. Mitsuishi} and K. Furuya",

year = "2004",

month = "6",

day = "1",

language = "English",

pages = "419",

journal = "Default journal",

}