Electron-beam-induced deposition of Fe nanoparticles and thin films on SrTiO3 substrates

Miyoko Tanaka, Kazutaka Mitsuishi, Masaki Takeguchi, Masayuki Shimojo, Kazuo Furuya, Nobuyuki Koguchi

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

We performed electron-beam-induced deposition (EBID) of Fe(CO)5 on cleaned Nb-doped SrTiO3(100) substrates at 673-873 K inside an ultrahigh vacuum transmission electron microscopy (UHV-TEM) system. When the substrate temperature is maintained at 673-723 K, broad-beam irradiation resulted in the fabrication of Fe nanoparticles that subsequently grew into a polycrystalline a-Fe film. Focused-beam irradiation was successful only at the beginning of the beam irradiation due to the charging up of the substrates. Deposition did not occur when the substrate temperature was increased to 773-873 K.

Original languageEnglish
Pages (from-to)6243-6246
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume46
Issue number9 B
DOIs
Publication statusPublished - 2007 Sep 20
Externally publishedYes

Fingerprint

Electron beams
electron beams
Nanoparticles
Thin films
nanoparticles
Irradiation
Substrates
thin films
irradiation
Ultrahigh vacuum
ultrahigh vacuum
charging
Transmission electron microscopy
Fabrication
Temperature
transmission electron microscopy
fabrication
temperature

Keywords

  • Electron-beam-induced deposition
  • Fe(CO)
  • Nanoparticles
  • SrTiO
  • Thin film
  • Transmission electron microscopy

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Electron-beam-induced deposition of Fe nanoparticles and thin films on SrTiO3 substrates. / Tanaka, Miyoko; Mitsuishi, Kazutaka; Takeguchi, Masaki; Shimojo, Masayuki; Furuya, Kazuo; Koguchi, Nobuyuki.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 46, No. 9 B, 20.09.2007, p. 6243-6246.

Research output: Contribution to journalArticle

Tanaka, Miyoko ; Mitsuishi, Kazutaka ; Takeguchi, Masaki ; Shimojo, Masayuki ; Furuya, Kazuo ; Koguchi, Nobuyuki. / Electron-beam-induced deposition of Fe nanoparticles and thin films on SrTiO3 substrates. In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 2007 ; Vol. 46, No. 9 B. pp. 6243-6246.
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