Electron-beam-induced deposition of Fe nanoparticles and thin films on SrTiO3 substrates

Miyoko Tanaka, Kazutaka Mitsuishi, Masaki Takeguchi, Masayuki Shimojo, Kazuo Furuya, Nobuyuki Koguchi

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

We performed electron-beam-induced deposition (EBID) of Fe(CO)5 on cleaned Nb-doped SrTiO3(100) substrates at 673-873 K inside an ultrahigh vacuum transmission electron microscopy (UHV-TEM) system. When the substrate temperature is maintained at 673-723 K, broad-beam irradiation resulted in the fabrication of Fe nanoparticles that subsequently grew into a polycrystalline a-Fe film. Focused-beam irradiation was successful only at the beginning of the beam irradiation due to the charging up of the substrates. Deposition did not occur when the substrate temperature was increased to 773-873 K.

Original languageEnglish
Pages (from-to)6243-6246
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume46
Issue number9 B
DOIs
Publication statusPublished - 2007 Sep 20

Keywords

  • Electron-beam-induced deposition
  • Fe(CO)
  • Nanoparticles
  • SrTiO
  • Thin film
  • Transmission electron microscopy

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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