Electron-beam-induced deposition of Fe nanoparticles and thin films on SrTiO3 substrates

Miyoko Tanaka; Kazutaka Mitsuishi; Masaki Takeguchi; Masayuki Shimojo; Kazuo Furuya; Nobuyuki Koguchi

doi:10.1143/JJAP.46.6243

Electron-beam-induced deposition of Fe nanoparticles and thin films on SrTiO₃ substrates

Miyoko Tanaka, Kazutaka Mitsuishi, Masaki Takeguchi, Masayuki Shimojo, Kazuo Furuya, Nobuyuki Koguchi

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

We performed electron-beam-induced deposition (EBID) of Fe(CO)₅ on cleaned Nb-doped SrTiO₃(100) substrates at 673-873 K inside an ultrahigh vacuum transmission electron microscopy (UHV-TEM) system. When the substrate temperature is maintained at 673-723 K, broad-beam irradiation resulted in the fabrication of Fe nanoparticles that subsequently grew into a polycrystalline a-Fe film. Focused-beam irradiation was successful only at the beginning of the beam irradiation due to the charging up of the substrates. Deposition did not occur when the substrate temperature was increased to 773-873 K.

Original language	English
Pages (from-to)	6243-6246
Number of pages	4
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	46
Issue number	9 B
DOIs	https://doi.org/10.1143/JJAP.46.6243
Publication status	Published - 2007 Sept 20
Externally published	Yes

Keywords

Electron-beam-induced deposition
Fe(CO)
Nanoparticles
SrTiO
Thin film
Transmission electron microscopy

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

Access to Document

10.1143/JJAP.46.6243

Cite this

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title = "Electron-beam-induced deposition of Fe nanoparticles and thin films on SrTiO3 substrates",

abstract = "We performed electron-beam-induced deposition (EBID) of Fe(CO)5 on cleaned Nb-doped SrTiO3(100) substrates at 673-873 K inside an ultrahigh vacuum transmission electron microscopy (UHV-TEM) system. When the substrate temperature is maintained at 673-723 K, broad-beam irradiation resulted in the fabrication of Fe nanoparticles that subsequently grew into a polycrystalline a-Fe film. Focused-beam irradiation was successful only at the beginning of the beam irradiation due to the charging up of the substrates. Deposition did not occur when the substrate temperature was increased to 773-873 K.",

keywords = "Electron-beam-induced deposition, Fe(CO), Nanoparticles, SrTiO, Thin film, Transmission electron microscopy",

author = "Miyoko Tanaka and Kazutaka Mitsuishi and Masaki Takeguchi and Masayuki Shimojo and Kazuo Furuya and Nobuyuki Koguchi",

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T1 - Electron-beam-induced deposition of Fe nanoparticles and thin films on SrTiO3 substrates

AU - Tanaka, Miyoko

AU - Mitsuishi, Kazutaka

AU - Takeguchi, Masaki

AU - Shimojo, Masayuki

AU - Furuya, Kazuo

AU - Koguchi, Nobuyuki

PY - 2007/9/20

Y1 - 2007/9/20

N2 - We performed electron-beam-induced deposition (EBID) of Fe(CO)5 on cleaned Nb-doped SrTiO3(100) substrates at 673-873 K inside an ultrahigh vacuum transmission electron microscopy (UHV-TEM) system. When the substrate temperature is maintained at 673-723 K, broad-beam irradiation resulted in the fabrication of Fe nanoparticles that subsequently grew into a polycrystalline a-Fe film. Focused-beam irradiation was successful only at the beginning of the beam irradiation due to the charging up of the substrates. Deposition did not occur when the substrate temperature was increased to 773-873 K.

AB - We performed electron-beam-induced deposition (EBID) of Fe(CO)5 on cleaned Nb-doped SrTiO3(100) substrates at 673-873 K inside an ultrahigh vacuum transmission electron microscopy (UHV-TEM) system. When the substrate temperature is maintained at 673-723 K, broad-beam irradiation resulted in the fabrication of Fe nanoparticles that subsequently grew into a polycrystalline a-Fe film. Focused-beam irradiation was successful only at the beginning of the beam irradiation due to the charging up of the substrates. Deposition did not occur when the substrate temperature was increased to 773-873 K.

KW - Electron-beam-induced deposition

KW - Fe(CO)

KW - Nanoparticles

KW - SrTiO

KW - Thin film

KW - Transmission electron microscopy

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