Electron beam induced deposition of position and size controlled structures on the nanometre scale

K. Furuya, K. Mitsuishi, M. Shimojo, M. Song, M. Tanaka, M. Takeguchi

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)239-242
JournalSpringer Proceedings in Physics
Volumevol. 107
Publication statusPublished - 2006 Jan 1

Cite this

Furuya, K., Mitsuishi, K., Shimojo, M., Song, M., Tanaka, M., & Takeguchi, M. (2006). Electron beam induced deposition of position and size controlled structures on the nanometre scale. Springer Proceedings in Physics, vol. 107, 239-242.

Electron beam induced deposition of position and size controlled structures on the nanometre scale. / Furuya, K.; Mitsuishi, K.; Shimojo, M.; Song, M.; Tanaka, M.; Takeguchi, M.

In: Springer Proceedings in Physics, Vol. vol. 107, 01.01.2006, p. 239-242.

Research output: Contribution to journalArticle

Furuya, K, Mitsuishi, K, Shimojo, M, Song, M, Tanaka, M & Takeguchi, M 2006, 'Electron beam induced deposition of position and size controlled structures on the nanometre scale', Springer Proceedings in Physics, vol. vol. 107, pp. 239-242.
Furuya, K. ; Mitsuishi, K. ; Shimojo, M. ; Song, M. ; Tanaka, M. ; Takeguchi, M. / Electron beam induced deposition of position and size controlled structures on the nanometre scale. In: Springer Proceedings in Physics. 2006 ; Vol. vol. 107. pp. 239-242.
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