Electron beam induced deposition of position and size controlled structures on the nanometre scale

K. Furuya, K. Mitsuishi, M. Shimojo, M. Song, M. Tanaka, M. Takeguchi

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)239-242
JournalSpringer Proceedings in Physics
Volumevol. 107
Publication statusPublished - 2006 Jan 1

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Furuya, K., Mitsuishi, K., Shimojo, M., Song, M., Tanaka, M., & Takeguchi, M. (2006). Electron beam induced deposition of position and size controlled structures on the nanometre scale. Springer Proceedings in Physics, vol. 107, 239-242.