Electron-beam-induced deposition of position and size controlled structures by an advanced transmission electron microscope

K. Furuya, K. Mitsuishi, M. Shimojo, M. Song, M. Tanaka [Unknown], M. Takeguchi

Research output: Contribution to journalArticle

Original languageEnglish
JournalDefault journal
Publication statusPublished - 2004 Aug 1

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