Electron-beam-induced deposition of position and size controlled structures by an advanced transmission electron microscope

K. Furuya, K. Mitsuishi, M. Shimojo, M. Song, M. Tanaka [Unknown], M. Takeguchi

Research output: Contribution to journalArticle

Original languageEnglish
JournalDefault journal
Publication statusPublished - 2004 Aug 1

Cite this

Electron-beam-induced deposition of position and size controlled structures by an advanced transmission electron microscope. / Furuya, K.; Mitsuishi, K.; Shimojo, M.; Song, M.; [Unknown], M. Tanaka; Takeguchi, M.

In: Default journal, 01.08.2004.

Research output: Contribution to journalArticle

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AU - Furuya, K.

AU - Mitsuishi, K.

AU - Shimojo, M.

AU - Song, M.

AU - [Unknown], M. Tanaka

AU - Takeguchi, M.

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