Electron beam-induced deposition using iron carbonyl and the effects of heat treatment on nanostructure

Masayuki Shimojo, M. Takeguchi, M. Tanaka, K. Mitsuishi, K. Furuya

Research output: Contribution to journalArticle

41 Citations (Scopus)

Abstract

Electron beam induced deposition was performed in a scanning electron microscope with a field emission gun using a precursor of iron carbonyl. Nanometer-sized dots and freestanding rods were produced on a carbon film. The nanostructures of as-deposited and heat treated dots and rods were characterized using electron diffraction and electron energy loss spectroscopy in a transmission electron microscope. The as-deposited nano-dots and rods were amorphous containing Fe and C with a small amount of O near the surface. After heat treating at 600°C for 1 h, the oxidized layer disappeared and several iron carbides were formed in the dots. In the freestanding rods, the amorphous deposit separated to α-Fe and Fe7C3 after the heat treatment.

Original languageEnglish
Pages (from-to)1869-1872
Number of pages4
JournalApplied Physics A: Materials Science and Processing
Volume79
Issue number8
DOIs
Publication statusPublished - 2004 Dec
Externally publishedYes

Fingerprint

Electron beams
Nanostructures
heat treatment
Electron microscopes
rods
Iron
Heat treatment
electron beams
iron
Electron energy loss spectroscopy
Carbon films
Electron diffraction
Field emission
Carbides
Deposits
electron microscopes
Scanning
heat
carbides
field emission

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy (miscellaneous)

Cite this

Electron beam-induced deposition using iron carbonyl and the effects of heat treatment on nanostructure. / Shimojo, Masayuki; Takeguchi, M.; Tanaka, M.; Mitsuishi, K.; Furuya, K.

In: Applied Physics A: Materials Science and Processing, Vol. 79, No. 8, 12.2004, p. 1869-1872.

Research output: Contribution to journalArticle

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