Electron beam induced depositions of nano-dots by the presence of the partial pressure of precursor

K. Furuya, M. Tanaka, Masayuki Shimojo, K. Mitsuishi

Research output: Contribution to journal › Article

Original languageEnglish
Pages (from-to)540-541
Number of pages2
JournalMicroscopy and Microanalysis
Volume10
Issue numberSUPPL. 2
DOIs
Publication statusPublished - 2004
Externally publishedYes

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Partial pressure
partial pressure
Electron beams
electron beams

ASJC Scopus subject areas

  • Instrumentation

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Electron beam induced depositions of nano-dots by the presence of the partial pressure of precursor. / Furuya, K.; Tanaka, M.; Shimojo, Masayuki; Mitsuishi, K.

In: Microscopy and Microanalysis, Vol. 10, No. SUPPL. 2, 2004, p. 540-541.

Research output: Contribution to journal › Article

Furuya, K, Tanaka, M, Shimojo, M & Mitsuishi, K 2004, 'Electron beam induced depositions of nano-dots by the presence of the partial pressure of precursor', Microscopy and Microanalysis, vol. 10, no. SUPPL. 2, pp. 540-541. https://doi.org/10.1017/S1431927604883892
Furuya K, Tanaka M, Shimojo M, Mitsuishi K. Electron beam induced depositions of nano-dots by the presence of the partial pressure of precursor. Microscopy and Microanalysis. 2004;10(SUPPL. 2):540-541. https://doi.org/10.1017/S1431927604883892
Furuya, K. ; Tanaka, M. ; Shimojo, Masayuki ; Mitsuishi, K. / Electron beam induced depositions of nano-dots by the presence of the partial pressure of precursor. In: Microscopy and Microanalysis. 2004 ; Vol. 10, No. SUPPL. 2. pp. 540-541.
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