Electron beam induced depositions of nano-dots by the presence of the partial pressure of precursor

K. Furuya, M. Tanaka, M. Shimojo, K. Mitsuishi

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	540-541
Number of pages	2
Journal	Microscopy and Microanalysis
Volume	10
Issue number	SUPPL. 2
DOIs	https://doi.org/10.1017/S1431927604883892
Publication status	Published - 2004 Sep 24

Cite this

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title = "Electron beam induced depositions of nano-dots by the presence of the partial pressure of precursor",

author = "K. Furuya and M. Tanaka and M. Shimojo and K. Mitsuishi",

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language = "English",

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pages = "540--541",

journal = "Microscopy and Microanalysis",

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AU - Furuya, K.

AU - Tanaka, M.

AU - Shimojo, M.

AU - Mitsuishi, K.

PY - 2004/9/24

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SP - 540

EP - 541

JO - Microscopy and Microanalysis

JF - Microscopy and Microanalysis

SN - 1431-9276

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