Electron beam induced depositions of nano-dots by the presence of the partial pressure of precursor

K. Furuya, M. Tanaka, Masayuki Shimojo, K. Mitsuishi

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)540-541
Number of pages2
JournalMicroscopy and Microanalysis
Volume10
Issue numberSUPPL. 2
DOIs
Publication statusPublished - 2004
Externally publishedYes

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Partial pressure
partial pressure
Electron beams
electron beams

ASJC Scopus subject areas

  • Instrumentation

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Electron beam induced depositions of nano-dots by the presence of the partial pressure of precursor. / Furuya, K.; Tanaka, M.; Shimojo, Masayuki; Mitsuishi, K.

In: Microscopy and Microanalysis, Vol. 10, No. SUPPL. 2, 2004, p. 540-541.

Research output: Contribution to journalArticle

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