Electron beam induced depositions of nano-dots by the presence of the partial pressure of precursor

K. Furuya, M. Tanaka, M. Shimojo, K. Mitsuishi

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	540-541
Number of pages	2
Journal	Microscopy and Microanalysis
Volume	10
Issue number	SUPPL. 2
DOIs	https://doi.org/10.1017/S1431927604883892
Publication status	Published - 2004 Sep 24
Externally published	Yes

ASJC Scopus subject areas

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author = "K. Furuya and M. Tanaka and M. Shimojo and K. Mitsuishi",

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AU - Shimojo, M.

AU - Mitsuishi, K.

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