Electron beam-induced formation of nanosized α-Fe crystals

W. Zhang, M. Shimojo, M. Takeguchi, K. Furuya

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)


Focused electron beam induced chemical vapor deposition was performed in a scanning electron microscope with a field emission gun using a precursor of iron carbonyl. Due to the longer deposition time and higher gas pressure than those of our previous electron beam-induced deposition method, a new type of deposition occurred. A large amount of nanosized crystals were produced around the focused beam irradiation point on a carbon substrate at room temperature. The nanocrystals were systematically characterized using transmission electron microscopy with electron energy loss spectroscopy (EELS), and were identified to be single crystals of α-Fe.

Original languageEnglish
Pages (from-to)2577-2580
Number of pages4
JournalJournal of Materials Science
Issue number9
Publication statusPublished - 2006 May 1
Externally publishedYes

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering


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