Electron beam-induced nano-deposition using a transmission electron microscope

M. Shimojo, K. Mitsuishi, M. Tanaka, M. Song, K. Furuya

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)


Nanometre-sized structures were fabricated by electron beam-induced deposition in a scanning transmission electron microscope. A small amount of metal-organic gases, W(CO)6 and dimethyl acetylacetonato gold, were introduced near a substrate in the chamber of the microscope. The gas was decomposed by the irradiation of focused electron beams and nanometre-sized deposits containing W or Au were produced. Moving the beam position enables us to produce structures with a variety of shapes. High-resolution electron microscopy observation revealed that the structures consisted of nano-crystalline and amorphous parts.

Original languageEnglish
Title of host publicationCross-Disciplinary Applied Research in Materials Science and Technology - Proceedings of the 1st International Meeting on Applied Physics, (APHYS-2003)
Number of pages4
Publication statusPublished - 2005 Dec 1
Externally publishedYes
Event1st International Meeting on Applied Physics, APHYS-2003 - Badajoz, Spain
Duration: 2003 Oct 132003 Oct 18

Publication series

NameMaterials Science Forum
ISSN (Print)0255-5476


Conference1st International Meeting on Applied Physics, APHYS-2003


  • Deposition
  • Electron beam
  • Metal-organic gas
  • Nano-fabrication
  • Structure

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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