Electron induced nanodeposition of tungsten using field emission scanning and transmission electron microscopes

M. Shimojo, K. Mitsuishi, A. Tameike, K. Furuya

Research output: Contribution to journalArticle

33 Citations (Scopus)
Original languageEnglish
Pages (from-to)742-746
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume22
Issue number2
DOIs
Publication statusPublished - 2004

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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