Electroplating of metal micro-structure using a resist micro-machined by proton beam writing

N. Uchiya, Y. Furuta, H. Nishikawa, T. Watanabe, J. Haga, T. Satoh, M. Oikawa, T. Ohkubo, Y. Ishii, T. Kamiya

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The micro-structure of PMMA was successfully transcribed to the Ni structure as a reversal pattern. The PBW was useful method to obtain high-aspect-ratio metal micro-structures, coupled with the electroplating technique. Therefore, the PBW is a promising tool for fabrication of metal components such as a stamp for imprint lithography [6]. Imprinting using the 300-nm-thick Ni structure on PMMA was also demonstrated.

Original languageEnglish
Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
Pages288-289
Number of pages2
DOIs
Publication statusPublished - 2007 Dec 1
Events20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, Japan
Duration: 2007 Nov 52007 Nov 8

Publication series

NameDigest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

Conference

Conferences20th International Microprocesses and Nanotechnology Conference, MNC 2007
CountryJapan
CityKyoto
Period07/11/507/11/8

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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    Uchiya, N., Furuta, Y., Nishikawa, H., Watanabe, T., Haga, J., Satoh, T., Oikawa, M., Ohkubo, T., Ishii, Y., & Kamiya, T. (2007). Electroplating of metal micro-structure using a resist micro-machined by proton beam writing. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC (pp. 288-289). [4456217] (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). https://doi.org/10.1109/IMNC.2007.4456217