Electroplating of metal micro-structure using a resist micro-machined by proton beam writing

N. Uchiya, Y. Furuta, H. Nishikawa, T. Watanabe, J. Haga, T. Satoh, M. Oikawa, T. Ohkubo, Y. Ishii, T. Kamiya

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Engineering & Materials Science