Electrostatic charge distribution in the dielectric layer of alumina electrostatic chuck

T. Watanabe, T. Kitabayashi, C. Nakayama

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Electrostatic charge and its distribution in the dielectric layer of TiO2- and Cr2O3-added alumina electrostatic chucks has been studied. The electrostatic potential was evaluated at various applied voltages by an electrostatic potential meter and it demonstrated the existence of charges with opposite polarities. Direct SEM observation and toner development of the charged ceramic surface was carried out to clarify the charge distribution. The charge contrast was not uniform on the ceramic microstructure and the charge was distributed in the form of grains. Taking into consideration these results, the relationship between electrostatic charge distribution and ceramic microstructure is discussed.

Original languageEnglish
Pages (from-to)3510-3516
Number of pages7
JournalJournal of Materials Science
Volume29
Issue number13
DOIs
Publication statusPublished - 1994 Jan 1

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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