Electrostatic Force and Absorption Current of Alumina Electrostatic Chuck

Toshiya Watanabe, Tetsuo Kitabayashi, Chiaki Nakayama

Research output: Contribution to journalArticle

26 Citations (Scopus)

Abstract

Electrostatic chucks composed of alumina ceramics doped with 1.3 wt% TiO2 and 3.5 wt% Cr2O3 were fabricated. Evaluations of electrostatic force and absorption charge in various atmospheres were carried out. The electrostatic force in various atmospheres clarified that the electrostatic force is affected not only by the bulk resistance, but also by the surface resistance of the ceramics. Absorption charge measurements revealed that the surface resistance affects the charge distribution of the dielectric layer, and it is deduced that the large electrostatic force of the alumina electrostatic chuck in the vacuum atmosphere is explained by the space charge which concentrates on the dielectric layer and intensity contact potential difference.

Original languageEnglish
Pages (from-to)2145-2150
Number of pages6
JournalJapanese Journal of Applied Physics
Volume31
Issue number7 R
DOIs
Publication statusPublished - 1992 Jul

Keywords

  • Absorption current
  • Alumina
  • Charge distribution
  • Chromium oxide
  • Electrostatic chuck
  • Electrostatic force
  • Titanium oxide

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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