Electrostatic force and absorption current of alumina electrostatic chuck

Toshiya Watanabe, Tetsuo Kitabayashi, Chiaki Nakayama

Research output: Contribution to journalArticle

26 Citations (Scopus)

Abstract

Electrostatic chucks composed of alumina ceramics doped with 1.3 wt% TiO2 and 3.5 wt% Cr2O3 were fabricated. Evaluations of electrostatic force and absorption charge in various atmospheres were carried out. The electrostatic force in various atmospheres clarified that the electrostatic force is affected not only by the bulk resistance, but also by the surface resistance of the ceramics. Absorption charge measurements revealed that the surface resistance affects the charge distribution of the dielectric layer, and it is deduced that the large electrostatic force of the alumina electrostatic chuck in the vacuum atmosphere is explained by the space charge which concentrates on the dielectric layer and intensity contact potential difference.

Original languageEnglish
Pages (from-to)2145-2150
Number of pages6
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume31
Issue number7
Publication statusPublished - 1992 Jul
Externally publishedYes

Fingerprint

Chucks
Electrostatic force
Electrostatics
Alumina
aluminum oxides
electrostatics
Surface resistance
atmospheres
Charge distribution
Electric space charge
ceramics
contact potentials
Vacuum
charge distribution
space charge
vacuum
evaluation

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Electrostatic force and absorption current of alumina electrostatic chuck. / Watanabe, Toshiya; Kitabayashi, Tetsuo; Nakayama, Chiaki.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 31, No. 7, 07.1992, p. 2145-2150.

Research output: Contribution to journalArticle

@article{9ed07d42e6a24c0d8ad975dcfe72823d,
title = "Electrostatic force and absorption current of alumina electrostatic chuck",
abstract = "Electrostatic chucks composed of alumina ceramics doped with 1.3 wt{\%} TiO2 and 3.5 wt{\%} Cr2O3 were fabricated. Evaluations of electrostatic force and absorption charge in various atmospheres were carried out. The electrostatic force in various atmospheres clarified that the electrostatic force is affected not only by the bulk resistance, but also by the surface resistance of the ceramics. Absorption charge measurements revealed that the surface resistance affects the charge distribution of the dielectric layer, and it is deduced that the large electrostatic force of the alumina electrostatic chuck in the vacuum atmosphere is explained by the space charge which concentrates on the dielectric layer and intensity contact potential difference.",
author = "Toshiya Watanabe and Tetsuo Kitabayashi and Chiaki Nakayama",
year = "1992",
month = "7",
language = "English",
volume = "31",
pages = "2145--2150",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "7",

}

TY - JOUR

T1 - Electrostatic force and absorption current of alumina electrostatic chuck

AU - Watanabe, Toshiya

AU - Kitabayashi, Tetsuo

AU - Nakayama, Chiaki

PY - 1992/7

Y1 - 1992/7

N2 - Electrostatic chucks composed of alumina ceramics doped with 1.3 wt% TiO2 and 3.5 wt% Cr2O3 were fabricated. Evaluations of electrostatic force and absorption charge in various atmospheres were carried out. The electrostatic force in various atmospheres clarified that the electrostatic force is affected not only by the bulk resistance, but also by the surface resistance of the ceramics. Absorption charge measurements revealed that the surface resistance affects the charge distribution of the dielectric layer, and it is deduced that the large electrostatic force of the alumina electrostatic chuck in the vacuum atmosphere is explained by the space charge which concentrates on the dielectric layer and intensity contact potential difference.

AB - Electrostatic chucks composed of alumina ceramics doped with 1.3 wt% TiO2 and 3.5 wt% Cr2O3 were fabricated. Evaluations of electrostatic force and absorption charge in various atmospheres were carried out. The electrostatic force in various atmospheres clarified that the electrostatic force is affected not only by the bulk resistance, but also by the surface resistance of the ceramics. Absorption charge measurements revealed that the surface resistance affects the charge distribution of the dielectric layer, and it is deduced that the large electrostatic force of the alumina electrostatic chuck in the vacuum atmosphere is explained by the space charge which concentrates on the dielectric layer and intensity contact potential difference.

UR - http://www.scopus.com/inward/record.url?scp=0026895603&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0026895603&partnerID=8YFLogxK

M3 - Article

VL - 31

SP - 2145

EP - 2150

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 7

ER -