Enhancement of local electrical conductivities in SiC by femtosecond laser modification

Manato Deki; Takuto Ito; Minoru Yamamoto; Takuro Tomita; Shigeki Matsuo; Shuichi Hashimoto; Takahiro Kitada; Toshiro Isu; Shinobu Onoda; Takeshi Ohshima

doi:10.1063/1.3573786

Enhancement of local electrical conductivities in SiC by femtosecond laser modification

Manato Deki, Takuto Ito, Minoru Yamamoto, Takuro Tomita, Shigeki Matsuo, Shuichi Hashimoto, Takahiro Kitada, Toshiro Isu, Shinobu Onoda, Takeshi Ohshima

Department of Mechanical Engineering

Research output: Contribution to journal › Article

10 Citations (Scopus)

Abstract

Enhancement of local electric conductivities induced by femtosecond laser modification in silicon carbide was studied. Current-voltage (I-V) characteristics of the laser-modified regions were measured between the ion-implanted metal contacts. Interestingly, the resistance sharply decreased in the fluence range from 5.0 to 6.7 J/ cm². The resistance at the irradiation fluence of 53 J/ cm² decreased by more than six orders of magnitude compared with the nonirradiated one. From the I-V characteristics and the scanning electron microscope observations, we conclude that the phase separation associate with the formation of classical laser induced periodic structure causes the drastic increase in electric conductivity.

Original language	English
Article number	133104
Journal	Applied Physics Letters
Volume	98
Issue number	13
DOIs	https://doi.org/10.1063/1.3573786
Publication status	Published - 2011 Mar 28

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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Deki, M., Ito, T., Yamamoto, M., Tomita, T., Matsuo, S., Hashimoto, S., Kitada, T., Isu, T., Onoda, S., & Ohshima, T. (2011). Enhancement of local electrical conductivities in SiC by femtosecond laser modification. Applied Physics Letters, 98(13), [133104]. https://doi.org/10.1063/1.3573786

Enhancement of local electrical conductivities in SiC by femtosecond laser modification. / Deki, Manato; Ito, Takuto; Yamamoto, Minoru; Tomita, Takuro; Matsuo, Shigeki; Hashimoto, Shuichi; Kitada, Takahiro; Isu, Toshiro; Onoda, Shinobu; Ohshima, Takeshi.

In: Applied Physics Letters, Vol. 98, No. 13, 133104, 28.03.2011.

Research output: Contribution to journal › Article

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