Abstract
Proton beam writing (PBW) is known to be a powerful tool with unique advantages for microfabrication. In order to solve remaining problems and bring the PBW technology to a new level of applications, we propose a microfabrication system based on a PBW that makes fabrication of microstructures in an area only a centimeter large possible. We combined XY-stage control and electrostatic scanning to eliminate the area restrictions of our previous PBW system, and included a feature for importing CAD (Computer Aided Design) data which enables faster and more accurate development of complicated structures.
| Original language | English |
|---|---|
| Pages (from-to) | 12-17 |
| Number of pages | 6 |
| Journal | Microelectronic Engineering |
| Volume | 102 |
| DOIs | |
| Publication status | Published - 2013 Feb |
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Keywords
- Proton beam writing
- Scanning pattern
- Stage movement
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
- Surfaces, Coatings and Films
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
Cite this
Enhancing proton beam writing system with auto scanning software and stage movement. / Nguyen, Truong Phi; Teshima, Ryo; Hasegawa, Tadahiro; Nishikawa, Hiroyuki.
In: Microelectronic Engineering, Vol. 102, 02.2013, p. 12-17.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Enhancing proton beam writing system with auto scanning software and stage movement
AU - Nguyen, Truong Phi
AU - Teshima, Ryo
AU - Hasegawa, Tadahiro
AU - Nishikawa, Hiroyuki
PY - 2013/2
Y1 - 2013/2
N2 - Proton beam writing (PBW) is known to be a powerful tool with unique advantages for microfabrication. In order to solve remaining problems and bring the PBW technology to a new level of applications, we propose a microfabrication system based on a PBW that makes fabrication of microstructures in an area only a centimeter large possible. We combined XY-stage control and electrostatic scanning to eliminate the area restrictions of our previous PBW system, and included a feature for importing CAD (Computer Aided Design) data which enables faster and more accurate development of complicated structures.
AB - Proton beam writing (PBW) is known to be a powerful tool with unique advantages for microfabrication. In order to solve remaining problems and bring the PBW technology to a new level of applications, we propose a microfabrication system based on a PBW that makes fabrication of microstructures in an area only a centimeter large possible. We combined XY-stage control and electrostatic scanning to eliminate the area restrictions of our previous PBW system, and included a feature for importing CAD (Computer Aided Design) data which enables faster and more accurate development of complicated structures.
KW - Proton beam writing
KW - Scanning pattern
KW - Stage movement
UR - http://www.scopus.com/inward/record.url?scp=84869087273&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84869087273&partnerID=8YFLogxK
U2 - 10.1016/j.mee.2012.02.015
DO - 10.1016/j.mee.2012.02.015
M3 - Article
AN - SCOPUS:84869087273
VL - 102
SP - 12
EP - 17
JO - Microelectronic Engineering
JF - Microelectronic Engineering
SN - 0167-9317
ER -