Abstract
Proton beam writing (PBW) is known to be a powerful tool with unique advantages for microfabrication. In order to solve remaining problems and bring the PBW technology to a new level of applications, we propose a microfabrication system based on a PBW that makes fabrication of microstructures in an area only a centimeter large possible. We combined XY-stage control and electrostatic scanning to eliminate the area restrictions of our previous PBW system, and included a feature for importing CAD (Computer Aided Design) data which enables faster and more accurate development of complicated structures.
| Original language | English |
|---|---|
| Pages (from-to) | 12-17 |
| Number of pages | 6 |
| Journal | Microelectronic Engineering |
| Volume | 102 |
| DOIs | |
| Publication status | Published - 2013 Feb 1 |
Keywords
- Proton beam writing
- Scanning pattern
- Stage movement
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering
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Cite this
Nguyen, T. P., Teshima, R., Hasegawa, T., & Nishikawa, H. (2013). Enhancing proton beam writing system with auto scanning software and stage movement. Microelectronic Engineering, 102, 12-17. https://doi.org/10.1016/j.mee.2012.02.015