Enhancing proton beam writing system with auto scanning software and stage movement

Truong Phi Nguyen; Ryo Teshima; Tadahiro Hasegawa; Hiroyuki Nishikawa

doi:10.1016/j.mee.2012.02.015

Enhancing proton beam writing system with auto scanning software and stage movement

Truong Phi Nguyen, Ryo Teshima, Tadahiro Hasegawa, Hiroyuki Nishikawa

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

Proton beam writing (PBW) is known to be a powerful tool with unique advantages for microfabrication. In order to solve remaining problems and bring the PBW technology to a new level of applications, we propose a microfabrication system based on a PBW that makes fabrication of microstructures in an area only a centimeter large possible. We combined XY-stage control and electrostatic scanning to eliminate the area restrictions of our previous PBW system, and included a feature for importing CAD (Computer Aided Design) data which enables faster and more accurate development of complicated structures.

Original language	English
Pages (from-to)	12-17
Number of pages	6
Journal	Microelectronic Engineering
Volume	102
DOIs	https://doi.org/10.1016/j.mee.2012.02.015
Publication status	Published - 2013 Feb

Keywords

Proton beam writing
Scanning pattern
Stage movement

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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title = "Enhancing proton beam writing system with auto scanning software and stage movement",

abstract = "Proton beam writing (PBW) is known to be a powerful tool with unique advantages for microfabrication. In order to solve remaining problems and bring the PBW technology to a new level of applications, we propose a microfabrication system based on a PBW that makes fabrication of microstructures in an area only a centimeter large possible. We combined XY-stage control and electrostatic scanning to eliminate the area restrictions of our previous PBW system, and included a feature for importing CAD (Computer Aided Design) data which enables faster and more accurate development of complicated structures.",

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author = "Nguyen, {Truong Phi} and Ryo Teshima and Tadahiro Hasegawa and Hiroyuki Nishikawa",

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AU - Nguyen, Truong Phi

AU - Teshima, Ryo

AU - Hasegawa, Tadahiro

AU - Nishikawa, Hiroyuki

PY - 2013/2

Y1 - 2013/2

N2 - Proton beam writing (PBW) is known to be a powerful tool with unique advantages for microfabrication. In order to solve remaining problems and bring the PBW technology to a new level of applications, we propose a microfabrication system based on a PBW that makes fabrication of microstructures in an area only a centimeter large possible. We combined XY-stage control and electrostatic scanning to eliminate the area restrictions of our previous PBW system, and included a feature for importing CAD (Computer Aided Design) data which enables faster and more accurate development of complicated structures.

AB - Proton beam writing (PBW) is known to be a powerful tool with unique advantages for microfabrication. In order to solve remaining problems and bring the PBW technology to a new level of applications, we propose a microfabrication system based on a PBW that makes fabrication of microstructures in an area only a centimeter large possible. We combined XY-stage control and electrostatic scanning to eliminate the area restrictions of our previous PBW system, and included a feature for importing CAD (Computer Aided Design) data which enables faster and more accurate development of complicated structures.

KW - Proton beam writing

KW - Scanning pattern

KW - Stage movement

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EP - 17

JO - Microelectronic Engineering

JF - Microelectronic Engineering

SN - 0167-9317

ER -

Enhancing proton beam writing system with auto scanning software and stage movement

Abstract

Keywords

ASJC Scopus subject areas

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