Enhancing proton beam writing system with auto scanning software and stage movement

Truong Phi Nguyen, Ryo Teshima, Tadahiro Hasegawa, Hiroyuki Nishikawa

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Proton beam writing (PBW) is known to be a powerful tool with unique advantages for microfabrication. In order to solve remaining problems and bring the PBW technology to a new level of applications, we propose a microfabrication system based on a PBW that makes fabrication of microstructures in an area only a centimeter large possible. We combined XY-stage control and electrostatic scanning to eliminate the area restrictions of our previous PBW system, and included a feature for importing CAD (Computer Aided Design) data which enables faster and more accurate development of complicated structures.

Original languageEnglish
Pages (from-to)12-17
Number of pages6
JournalMicroelectronic Engineering
Volume102
DOIs
Publication statusPublished - 2013 Feb 1

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Keywords

  • Proton beam writing
  • Scanning pattern
  • Stage movement

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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