Evaluation of microscopic structural randomness in SiO 2 by analysis of photoluminescence decay profiles

Keisuke Ishii, Kwang Soo Seol, Yoshimichi Ohki, Hiroyuki Nishikawa

Research output: Contribution to journalArticle

Abstract

Microscopic structural randomness in SiO 2, a typical electrical insulating material, was evaluated by observing the decay profile of the photoluminescence due to oxygen vacancies (≡Si-Si≡). As samples with different degrees of randomness, an ion-implanted thermal SiO 2 film, SiO 2 films formed by plasma-enhanced chemical vapor deposition of tetraethoxysilane with and without doped fluorine, a buried oxide film prepared by SIMOX (separation by ion-implanted oxygen), and a bulk silica glass prepared by the soot-remelting method were tested. By analyzing the decay profile with a stretched exponential function, it was found that the deviation of the decay profile from a single exponential function is larger in the samples whose infrared absorption properties and HF etch rate suggest greater structural randomness.

Original languageEnglish
Pages (from-to)1-5
Number of pages5
JournalElectrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi)
Volume119
Issue number3
Publication statusPublished - 1997
Externally publishedYes

Fingerprint

Exponential functions
Photoluminescence
Remelting
Insulating materials
Ions
Infrared absorption
Oxygen vacancies
Fused silica
Plasma enhanced chemical vapor deposition
Soot
Fluorine
Oxide films
Oxygen
Polymers
Hot Temperature

Keywords

  • Decay profile
  • Oxygen vacancy
  • Photoluminescence
  • SiO
  • Stretched exponential function
  • Structural randomness

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Evaluation of microscopic structural randomness in SiO 2 by analysis of photoluminescence decay profiles. / Ishii, Keisuke; Seol, Kwang Soo; Ohki, Yoshimichi; Nishikawa, Hiroyuki.

In: Electrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi), Vol. 119, No. 3, 1997, p. 1-5.

Research output: Contribution to journalArticle

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