Evaluation of SiO2 thin films prepared by sol-gel method using photoirradiation

S. Maekawa, T. Ohishi

Research output: Contribution to journalLetter

30 Citations (Scopus)

Abstract

SiO2 films were prepared by the sol-gel method using photoirradiation, and the properties microhardness and HF etch rate, etc., were evaluated. The hardness and anti-corrosion in HF of photoirradiated films were superior to films only heated at the same temperature.

Original languageEnglish
Pages (from-to)207-209
Number of pages3
JournalJournal of Non-Crystalline Solids
Volume169
Issue number1-2
DOIs
Publication statusPublished - 1994 Mar 11

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Condensed Matter Physics
  • Materials Chemistry

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